Invention Grant
US06919245B2 Dynamic random access memory cell layout and fabrication method thereof 有权
动态随机存取存储单元布局及其制造方法

Dynamic random access memory cell layout and fabrication method thereof
Abstract:
A dynamic random access memory (DRAM) cell layout for arranging deep trenches and active areas and a fabrication method thereof. An active area comprises two vertical transistors, a common bitline contact and two deep trenches. The first vertical transistor is formed on a region where the first deep trench is partially overlapped with the first gate conductive line. The second vertical transistor is formed on a region where the second deep trench is partially overlapped with the second gate conductive line.
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