Invention Grant
US06919245B2 Dynamic random access memory cell layout and fabrication method thereof
有权
动态随机存取存储单元布局及其制造方法
- Patent Title: Dynamic random access memory cell layout and fabrication method thereof
- Patent Title (中): 动态随机存取存储单元布局及其制造方法
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Application No.: US10972505Application Date: 2004-10-25
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Publication No.: US06919245B2Publication Date: 2005-07-19
- Inventor: Ming-Cheng Chang , Tieh-Chiang Wu , Yi-Nan Chen , Jeng-Ping Lin
- Applicant: Ming-Cheng Chang , Tieh-Chiang Wu , Yi-Nan Chen , Jeng-Ping Lin
- Applicant Address: TW Taoyuan
- Assignee: Nanya Technology Corporation
- Current Assignee: Nanya Technology Corporation
- Current Assignee Address: TW Taoyuan
- Agency: Quintero Law Office
- Priority: TW92124187A 20030902
- Main IPC: H01L21/334
- IPC: H01L21/334 ; H01L21/8242 ; H01L27/108

Abstract:
A dynamic random access memory (DRAM) cell layout for arranging deep trenches and active areas and a fabrication method thereof. An active area comprises two vertical transistors, a common bitline contact and two deep trenches. The first vertical transistor is formed on a region where the first deep trench is partially overlapped with the first gate conductive line. The second vertical transistor is formed on a region where the second deep trench is partially overlapped with the second gate conductive line.
Public/Granted literature
- US20050082590A1 Dynamic random access memory cell layout and fabrication method thereof Public/Granted day:2005-04-21
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