Invention Grant
- Patent Title: Movable MEMS-based noncontacting device
- Patent Title (中): 可移动的基于MEMS的非接触器件
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Application No.: US10791633Application Date: 2004-03-01
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Publication No.: US07030537B2Publication Date: 2006-04-18
- Inventor: Bevan Staple , Richard Roth
- Applicant: Bevan Staple , Richard Roth
- Applicant Address: US CO Boulder
- Assignee: Network Photonics, Inc.
- Current Assignee: Network Photonics, Inc.
- Current Assignee Address: US CO Boulder
- Agency: Townsend and Townsend and Crew LLP
- Main IPC: H02N1/00
- IPC: H02N1/00 ; G02B26/08

Abstract:
A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First hand second electrodes are connected with the substrate and are configured to tilt the two tiltable assemblies such that they are interdigitated. In various embodiments, the tiltable assemblies are configured as cantilever arrangements and/or torsion-beam arrangements.
Public/Granted literature
- US20040223686A1 Movable MEMS-based noncontacting device Public/Granted day:2004-11-11
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