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    Movable MEMS-based noncontacting device
    1.
    发明授权
    Movable MEMS-based noncontacting device 失效
    可移动的基于MEMS的非接触器件

    公开(公告)号：US07030537B2

    公开(公告)日：2006-04-18

    申请号：US10791633

    申请日：2004-03-01

    Applicant: Bevan Staple ,  Richard Roth

    Inventor： Bevan Staple ,  Richard Roth

    IPC: H02N1/00 ,  G02B26/08

    CPC classification number: B81B3/0008 ,  B81B2201/042 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/3556 ,  G02B6/3558 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/358

    Abstract: A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First hand second electrodes are connected with the substrate and are configured to tilt the two tiltable assemblies such that they are interdigitated. In various embodiments, the tiltable assemblies are configured as cantilever arrangements and/or torsion-beam arrangements.

    Abstract translation: 提供了一种减轻沉降问题的转向灯微结构。 包括反射涂层的第一可倾斜组件与衬底连接。 第二可倾斜组件也与衬底连接。 第一手第二电极与衬底连接并且被配置为使两个可倾斜组件倾斜以使它们相互交错。 在各种实施例中，可倾斜组件被配置为悬臂布置和/或扭力梁布置。

    Method for reducing leaching in metal-coated MEMS
    2.
    发明授权
    Method for reducing leaching in metal-coated MEMS 有权
    金属涂层MEMS中减少浸出的方法

    公开(公告)号：US06616853B1

    公开(公告)日：2003-09-09

    申请号：US09799916

    申请日：2001-03-05

    Applicant: Bevan Staple ,  David Miller ,  Lilac Muller

    Inventor： Bevan Staple ,  David Miller ,  Lilac Muller

    IPC: H01L2100

    CPC classification number: B81C1/00476 ,  B81B2201/042 ,  B81C2201/0133 ,  G02B6/3518

    Abstract: A method is provided for preventing dopant leaching from a doped structural film during fabrication of a microelectromechanical system. A microstructure that includes the doped structural film, sacrificial material, and metallic material is produced with a combination of deposition, patterning, and etching techniques. The sacrificial material is dissolved with a release solution that has a substance destructive to the sacrificial material. This substance also acts as an electrolyte, forming a galvanic cell with the doped structural film and metallic material acting as electrodes. The effects of the galvanic cell are suppressed by including a nonionic detergent mixed in the release solution.

    Abstract translation: 提供了一种在微电子机械系统的制造期间防止掺杂的结构膜的掺杂剂浸出的方法。 包括掺杂的结构膜，牺牲材料和金属材料的微结构通过沉积，图案化和蚀刻技术的组合来生产。 牺牲材料用具有对牺牲材料具有破坏性的物质的释放溶液溶解。 该物质还用作电解质，形成具有掺杂结构膜和金属材料作为电极的原电池。 通过包括混合在脱模溶液中的非离子洗涤剂来抑制原电池的影响。

    SYSTEMS AND METHODS OF SCENE AND ACTION CAPTURE USING IMAGING SYSTEM INCORPORATING 3D LIDAR
    4.
    发明申请
    SYSTEMS AND METHODS OF SCENE AND ACTION CAPTURE USING IMAGING SYSTEM INCORPORATING 3D LIDAR 有权
    使用3D激光雷达的成像系统的场景和动作捕捉方法

    公开(公告)号：US20120044476A1

    公开(公告)日：2012-02-23

    申请号：US13099118

    申请日：2011-05-02

    Applicant: Ronald P. Earhart ,  Rex M. Craig ,  Christian J. Grund ,  Bevan Staple ,  Carl S. Weimer

    Inventor： Ronald P. Earhart ,  Rex M. Craig ,  Christian J. Grund ,  Bevan Staple ,  Carl S. Weimer

    IPC: G01C3/08

    CPC classification number: G01S3/7867 ,  G01S7/003 ,  G01S7/4813 ,  G01S7/4814 ,  G01S7/4816 ,  G01S17/023 ,  G01S17/58 ,  G01S17/87 ,  G01S17/88 ,  G01S17/89 ,  G01S17/933

    Abstract: The present invention pertains to systems and methods for the capture of information regarding scenes using single or multiple three-dimensional LADAR systems. Where multiple systems are included, those systems can be placed in different positions about the imaged scene such that each LADAR system provides different viewing perspectives and/or angles. In accordance with further embodiments, the single or multiple LADAR systems can include two-dimensional focal plane arrays, in addition to three-dimensional focal plane arrays, and associated light sources for obtaining three-dimensional information about a scene, including information regarding the contours of the objects within the scene. Processing of captured image information can be performed in real time, and processed scene information can include data frames that comprise three-dimensional and two-dimensional image data.

    Abstract translation: 本发明涉及用于捕获关于使用单个或多个三维LADAR系统的场景的信息的系统和方法。 在包括多个系统的地方，这些系统可以被放置在关于成像场景的不同位置，使得每个LADAR系统提供不同的观看视角和/或角度。 根据另外的实施例，除了三维焦平面阵列之外，单个或多个LADAR系统还可以包括二维焦平面阵列，以及用于获得关于场景的三维信息的相关联的光源，包括关于轮廓的信息 的场景内的物体。 拍摄图像信息的处理可以实时执行，并且处理的场景信息可以包括包括三维和二维图像数据的数据帧。

    Method to reduce release time of micromachined devices
    6.
    发明授权
    Method to reduce release time of micromachined devices 有权
    减少微加工设备的释放时间的方法

    公开(公告)号：US06525352B1

    公开(公告)日：2003-02-25

    申请号：US09837362

    申请日：2001-04-18

    Applicant: Lilac Muller ,  Bevan Staple

    Inventor： Lilac Muller ,  Bevan Staple

    IPC: H01L2714

    CPC classification number: B81C1/00547

    Abstract: A method for fabricating a micromachined device with a fast release step is provided. A first undoped sacrificial layer is deposited on a structural layer. A doped sacrificial layer is deposited on the first undoped sacrificial layer. A second undoped sacrificial layer is deposited on the doped sacrificial layer to produce a layered structure. An etchant is then applied to the layered structure.

    Abstract translation: 提供了一种用于制造具有快速释放步骤的微加工装置的方法。 第一未掺杂的牺牲层沉积在结构层上。 掺杂的牺牲层沉积在第一未掺杂的牺牲层上。 第二未掺杂的牺牲层沉积在掺杂牺牲层上以产生分层结构。 然后将蚀刻剂施加到分层结构。

    Surfactant-enhanced protection of micromechanical components from galvanic degradation
    7.
    发明授权
    Surfactant-enhanced protection of micromechanical components from galvanic degradation 失效
    表面活性剂增强了微机械部件对电流退化的保护

    公开(公告)号：US07560037B2

    公开(公告)日：2009-07-14

    申请号：US11213466

    申请日：2005-08-26

    Applicant: Bevan Staple ,  Jillian Buriak

    Inventor： Bevan Staple ,  Jillian Buriak

    IPC: H01B13/00

    CPC classification number: B82Y30/00 ,  B81C1/00476 ,  B81C1/00801 ,  B81C2201/0114 ,  B81C2201/0133 ,  B81C2201/0139 ,  B81C2201/053

    Abstract: A microelectromechanical structure is formed by depositing sacrificial and structural material over a substrate to form a structural layer on a component electrically attached with the substrate. The galvanic potential of the structural layer is greater than the galvanic potential of the component. At least a portion of the structural material is covered with a protective material that has a galvanic potential less than or equal to the galvanic potential of the component. The sacrificial material is removed with a release solution. At least one of the protective material and release solution is surfactanated, the surfactant functionalizing a surface of the component.

    Abstract translation: 通过将牺牲和结构材料沉积在衬底上以在与衬底电连接的部件上形成结构层来形成微机电结构。 结构层的电位大于元件的电位。 结构材料的至少一部分被保护材料覆盖，该保护材料具有小于或等于部件的电位的电位。 牺牲材料用释放溶液除去。 保护材料和释放溶液中的至少一种被表面活性化，表面活性剂对组分的表面进行官能化。

    Surfactant-enhanced protection of micromechanical components from galvanic degradation
    8.
    发明申请
    Surfactant-enhanced protection of micromechanical components from galvanic degradation 失效
    表面活性剂增强了微机械部件对电流退化的保护

    公开(公告)号：US20070289940A1

    公开(公告)日：2007-12-20

    申请号：US11213466

    申请日：2005-08-26

    Applicant: Bevan Staple ,  Jillian Buriak

    Inventor： Bevan Staple ,  Jillian Buriak

    IPC: H01B13/00

    CPC classification number: B82Y30/00 ,  B81C1/00476 ,  B81C1/00801 ,  B81C2201/0114 ,  B81C2201/0133 ,  B81C2201/0139 ,  B81C2201/053

    Abstract: A microelectromechanical structure is formed by depositing sacrificial and structural material over a substrate to form a structural layer on a component electrically attached with the substrate. The galvanic potential of the structural layer is greater than the galvanic potential of the component. At least a portion of the structural material is covered with a protective material that has a galvanic potential less than or equal to the galvanic potential of the component. The sacrificial material is removed with a release solution. At least one of the protective material and release solution is surfactanated, the surfactant functionalizing a surface of the component.

    Abstract translation: 通过将牺牲和结构材料沉积在衬底上以在与衬底电连接的部件上形成结构层来形成微机电结构。 结构层的电位大于元件的电位。 结构材料的至少一部分被保护材料覆盖，该保护材料具有小于或等于部件的电位的电位。 牺牲材料用释放溶液除去。 保护材料和释放溶液中的至少一种被表面活性化，表面活性剂对组分的表面进行官能化。

    Methods for affirming switched status of MEMS-based devices
    9.
    发明授权
    Methods for affirming switched status of MEMS-based devices 失效
    确定MEMS器件开关状态的方法

    公开(公告)号：US06969996B2

    公开(公告)日：2005-11-29

    申请号：US10839545

    申请日：2004-05-04

    Applicant: Bevan Staple ,  Robert Anderson

    Inventor： Bevan Staple ,  Robert Anderson

    IPC: G02B26/08 ,  G01R31/02

    CPC classification number: G02B26/0841

    Abstract: A configuration is provided by which it may be determined whether a MEMS device is in a select state. The select state is defined by a position of a moveable element, which is moved with electrostatic forces upon activation of an electrode. The select state is detected with a sensing configuration that has first and second regions. The regions are generally separated such that they are electrically uncoupled unless the moveable element is in the position that defines the select state. A detector may be provided to indicate whether the first and second regions are coupled electrically.

    Abstract translation: 提供了可以确定MEMS器件是否处于选择状态的配置。 选择状态由可动元件的位置限定，可移动元件在电极激活时用静电力移动。 用具有第一和第二区域的感测配置来检测选择状态。 这些区域通常被分开，使得它们被电分离，除非可移动元件处于限定选择状态的位置。 可以提供检测器来指示第一和第二区域是否电耦合。

    Method for reducing leaching in metal-coated MEMS
    10.
    发明授权
    Method for reducing leaching in metal-coated MEMS 失效
    金属涂层MEMS中减少浸出的方法

    公开(公告)号：US06939574B2

    公开(公告)日：2005-09-06

    申请号：US10632698

    申请日：2003-08-01

    Applicant: Bevan Staple ,  David Miller ,  Lilac Muller Muller

    Inventor： Bevan Staple ,  David Miller ,  Lilac Muller Muller

    IPC: B05D5/12 ,  B81C1/00 ,  B44C1/22 ,  H01L21/00

    CPC classification number: B81C1/00476 ,  B81B2201/042 ,  B81C2201/117

    Abstract: A method is provided for preventing dopant leaching from a doped structural film during fabrication of a microelectromechanical system. A microstructure that includes the doped structural film, sacrificial material, and metallic material is produced with a combination of deposition, patterning, and etching techniques. The sacrificial material is dissolved with a release solution that has a substance destructive to the sacrificial material. This substance also acts as an electrolyte, forming a galvanic cell with the doped structural film and metallic material acting as electrodes. The effects of the galvanic cell are suppressed by including a nonionic detergent mixed in the release solution.

    Abstract translation: 提供了一种在微电子机械系统的制造期间防止掺杂的结构膜的掺杂剂浸出的方法。 包括掺杂的结构膜，牺牲材料和金属材料的微结构通过沉积，图案化和蚀刻技术的组合来生产。 牺牲材料用具有对牺牲材料具有破坏性的物质的释放溶液溶解。 该物质还用作电解质，形成具有掺杂结构膜和金属材料作为电极的原电池。 通过包括混合在脱模溶液中的非离子洗涤剂来抑制原电池的影响。

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