Invention Grant
- Patent Title: Ion-implantation machine, control method thereof, and process for manufacturing integrated devices
- Patent Title (中): 离子注入机，其控制方法及制造集成装置的方法
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Application No.: US10657801Application Date: 2003-09-08
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Publication No.: US07060995B2Publication Date: 2006-06-13
- Inventor: Camillo Bresolin , Valter Soncini , Andrea Riva
- Applicant: Camillo Bresolin , Valter Soncini , Andrea Riva
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Agent Lisa K. Jorgenson; Robert Iannucci
- Priority: ITTO2002A0787 20020910
- Main IPC: H01J37/00
- IPC: H01J37/00
Abstract:
An ion-implantation machine has an implantation chamber with a vent inlet; a vacuum pump is connected to the implantation chamber through a vacuum valve. A pipe connects the vent inlet of the implantation chamber to a source of a fluid containing oxygen. The fluid containing oxygen is preferably environmental air. A flow-rate control valve is arranged on the pipe and is activated only after closing the vacuum valve.
Public/Granted literature
- US20040121498A1 Ion-implantation machine, control method thereof, and process for manufacturing integrated devices Public/Granted day:2004-06-24
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