Invention Grant
US07148496B2 System and method for proximity effect correction in imaging systems
失效
成像系统中邻近效应校正的系统和方法
- Patent Title: System and method for proximity effect correction in imaging systems
- Patent Title (中): 成像系统中邻近效应校正的系统和方法
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Application No.: US10823458Application Date: 2004-04-13
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Publication No.: US07148496B2Publication Date: 2006-12-12
- Inventor: Rajesh Menon , Dario Gil , George Barbastathis , Henry I. Smith
- Applicant: Rajesh Menon , Dario Gil , George Barbastathis , Henry I. Smith
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Gauthier & Connors LLP
- Main IPC: H01J37/304
- IPC: H01J37/304
Abstract:
A system and method are disclosed for providing error correction in an imaging system. The system includes an error determination unit for determining an amount of error associated with a spot at (x,y) in a binary pattern to be imaged, a determination unit for determining the location of a nearest exposed spot at (xi, yi) for each spot at (x,y), and a dose modification unit for modifying an exposure dose at the nearest exposed spot at (xi, yi) for each spot at (x,y).
Public/Granted literature
- US20050224725A1 System and method for proximity effect correction in imaging systems Public/Granted day:2005-10-13
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