Invention Grant
US07205174B2 Micromechanical actuator with multiple-plane comb electrodes and methods of making
有权
具有多平面梳电极的微机械致动器和制造方法
- Patent Title: Micromechanical actuator with multiple-plane comb electrodes and methods of making
- Patent Title (中): 具有多平面梳电极的微机械致动器和制造方法
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Application No.: US11224119Application Date: 2005-09-13
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Publication No.: US07205174B2Publication Date: 2007-04-17
- Inventor: Chang-Li Hung
- Applicant: Chang-Li Hung
- Applicant Address: TW Taipei
- Assignee: OPU Microsystems Application Corp.
- Current Assignee: OPU Microsystems Application Corp.
- Current Assignee Address: TW Taipei
- Agency: Lowe Hauptman & Berner, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A micro-electro-mechanical component comprising a movable element with comb electrodes, and two stationary elements with comb electrodes aligned and stacked on each other but electrically insulated by a layer of insulation material. The movable element is supported by multiple torsional hinges and suspended over a cavity such that the element can oscillate about an axis defined by the hinges. The comb electrodes of the movable element are interdigitated with the comb electrodes of one stationary element in the same plane to form an in-plane comb actuator. The comb electrodes of the movable element are also interdigitated in an elevated plane with the comb electrodes of another stationary element to form a vertical comb actuator. As a result, the micro-electro-mechanical component is both an in-plane actuator and a vertical comb actuator, or a multiple-plane actuator. Methods of fabricating such actuator are also described.
Public/Granted literature
- US20060008934A1 Micromechanical actuator with multiple-plane comb electrodes and methods of making Public/Granted day:2006-01-12
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