公开(公告)号：US07205174B2

公开(公告)日：2007-04-17

申请号：US11224119

申请日：2005-09-13

Applicant: Chang-Li Hung

Inventor： Chang-Li Hung

IPC: H01L21/00

CPC classification number: B81B3/0045 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro-electro-mechanical component comprising a movable element with comb electrodes, and two stationary elements with comb electrodes aligned and stacked on each other but electrically insulated by a layer of insulation material. The movable element is supported by multiple torsional hinges and suspended over a cavity such that the element can oscillate about an axis defined by the hinges. The comb electrodes of the movable element are interdigitated with the comb electrodes of one stationary element in the same plane to form an in-plane comb actuator. The comb electrodes of the movable element are also interdigitated in an elevated plane with the comb electrodes of another stationary element to form a vertical comb actuator. As a result, the micro-electro-mechanical component is both an in-plane actuator and a vertical comb actuator, or a multiple-plane actuator. Methods of fabricating such actuator are also described.

Abstract translation: 一种微电子机械部件，包括具有梳状电极的可移动元件和具有梳状电极的两个固定元件，梳状电极彼此对准并堆叠，但是被绝缘材料层电绝缘。 可移动元件由多个扭转铰链支撑并悬挂在空腔上，使得元件可以围绕由铰链限定的轴线摆动。 可移动元件的梳状电极与同一平面中的一个固定元件的梳状电极相互交错，以形成平面内的梳状致动器。 可移动元件的梳状电极也在另一个固定元件的梳状电极的高架平面上交错形成垂直梳状致动器。 结果，微电子机械部件既是面内致动器，也是垂直梳状致动器，或者是多平面致动器。 还描述了制造这种致动器的方法。

公开(公告)号：US08546995B2

公开(公告)日：2013-10-01

申请号：US12614025

申请日：2009-11-06

Applicant: Chang-Li Hung ,  Ta-Wei Lin

Inventor： Chang-Li Hung ,  Ta-Wei Lin

IPC: H02N1/00

CPC classification number: H02N1/008

Abstract: A micro-electro-mechanical actuator consists of a first semiconductor layer comprising a movable element with comb electrodes, a support element with inner and outer comb electrodes and a stationary element with comb electrodes, an electrical insulation layer, and a second semiconductor layer with a cavity to allow out-of-plane rotation of the movable and support elements. The movable element is mounted to the support element by a first pair of torsional hinges whereas the support element is mounted to the stationary element by a second pair of torsional hinges such that the actuator is in gimbaled structure. Inner comb electrodes of the support element interdigitate with comb electrodes of the movable element, and outer comb electrodes of the support element interdigitate with comb electrodes of the stationary element in the same plane defined by the first semiconductor layer to form in-plane comb-drive actuators. The in-plane comb-drive actuator may be controlled to generate two-dimensional oscillation of the movable element about the two axes defined by the torsional hinges. The second semiconductor layer may further comprise comb electrodes which interdigitate vertically with outer comb electrodes of support element to form vertical comb-drive actuators. Combing the in-plane and the vertical comb-drive actuators, the movable element is controllable to perform two-dimensional raster scan motion.

Abstract translation: 微电机械致动器由包括具有梳电极的可移动元件的第一半导体层，具有内梳状电极和外梳状电极的支撑元件和具有梳电极的固定元件，电绝缘层和具有梳状电极的第二半导体层组成 空腔以允许可移动和支撑元件的平面外旋转。 可移动元件通过第一对扭转铰链安装到支撑元件，而支撑元件通过第二对扭转铰链安装到固定元件，使得致动器处于万向结构中。 支撑元件的内梳电极与可移动元件的梳电极相互配合，并且支撑元件的外梳状电极与固定元件的梳电极在由第一半导体层限定的同一平面内相互交叉以形成面内梳状驱动 执行器。 可以控制面内梳状驱动致动器，以产生围绕由扭转铰链限定的两个轴线的可移动元件的二维振荡。 第二半导体层还可以包括与支撑元件的外梳状电极垂直相互配合以形成垂直梳状驱动致动器的梳状电极。 组合平面和垂直梳状驱动致动器，可移动元件是可控的，以执行二维光栅扫描运动。

公开(公告)号：US20100033691A1

公开(公告)日：2010-02-11

申请号：US12186234

申请日：2008-08-05

Applicant: Chang-Li Hung ,  Ta-Wei Lin

Inventor： Chang-Li Hung ,  Ta-Wei Lin

IPC: H04N5/74 ,  H01S3/10 ,  G02B26/08

CPC classification number: H04N9/317 ,  H04N9/3129 ,  H04N9/3194

Abstract: A scanning projection apparatus for displaying image comprises a light source for generating a light beam, a beam scanner which deflects the light beam to project a two dimensional image field, a modulation means for modulating the intensity of the light beam, and a sensor to detect the scanned light beam. The light source may consist of a plurality of semiconductor lasers and/or solid state lasers to generate light beams with wavelengths of red, green and blue colors aligned into a single light path. The image field is divided into an active image field for displaying image and a dark field in the perimeter of the image field wherein the light beam is switched off to reduce inherent image defects. The sensor is positioned outside the active image field to detect a scan line once per image frame to eliminate image distortion due to phase difference between the actual and the predicted positions of the scanned beam, and to detect both the horizontal and the vertical scanning operations of the beam scanner for safety precaution.

Abstract translation: 用于显示图像的扫描投影设备包括用于产生光束的光源，使光束偏转以投射二维图像场的光束扫描器，用于调制光束强度的调制装置和用于检测光束的传感器 扫描光束。 光源可以由多个半导体激光器和/或固态激光器组成，以产生对准到单个光路中的红色，绿色和蓝色波长的光束。 图像场被分成用于在图像场的周边中显示图像和暗场的有效图像场，其中关闭光束以减少固有的图像缺陷。 传感器位于有源图像场外部，以便每个图像帧检测一次扫描线，以消除由于扫描光束的实际和预测位置之间的相位差导致的图像失真，并且检测水平和垂直扫描操作 梁扫描仪用于安全防范。

公开(公告)号：US20110109194A1

公开(公告)日：2011-05-12

申请号：US12614025

申请日：2009-11-06

Applicant: Chang-Li Hung ,  Ta-Wei Lin

Inventor： Chang-Li Hung ,  Ta-Wei Lin

IPC: H02N11/00

CPC classification number: H02N1/008

Abstract: A micro-electro-mechanical actuator consists of a first semiconductor layer comprising a movable element with comb electrodes, a support element with inner and outer comb electrodes and a stationary element with comb electrodes, an electrical insulation layer, and a second semiconductor layer with a cavity to allow out-of-plane rotation of the movable and support elements. The movable element is mounted to the support element by a first pair of torsional hinges whereas the support element is mounted to the stationary element by a second pair of torsional hinges such that the actuator is in gimbaled structure. Inner comb electrodes of the support element interdigitate with comb electrodes of the movable element, and outer comb electrodes of the support element interdigitate with comb electrodes of the stationary element in the same plane defined by the first semiconductor layer to form in-plane comb-drive actuators. The in-plane comb-drive actuator may be controlled to generate two-dimensional oscillation of the movable element about the two axes defined by the torsional hinges. The second semiconductor layer may further comprise comb electrodes which interdigitate vertically with outer comb electrodes of support element to form vertical comb-drive actuators. Combing the in-plane and the vertical comb-drive actuators, the movable element is controllable to perform two-dimensional raster scan motion.

Abstract translation: 微电机械致动器由包括具有梳电极的可移动元件的第一半导体层，具有内梳状电极和外梳状电极的支撑元件和具有梳电极的固定元件，电绝缘层和具有梳状电极的第二半导体层组成 空腔以允许可移动和支撑元件的平面外旋转。 可移动元件通过第一对扭转铰链安装到支撑元件，而支撑元件通过第二对扭转铰链安装到固定元件，使得致动器处于万向结构中。 支撑元件的内梳电极与可移动元件的梳电极相互配合，并且支撑元件的外梳状电极与固定元件的梳电极在由第一半导体层限定的同一平面内相互交叉以形成面内梳状驱动 执行器。 可以控制面内梳状驱动致动器，以产生围绕由扭转铰链限定的两个轴线的可移动元件的二维振荡。 第二半导体层还可以包括与支撑元件的外梳状电极垂直相互配合以形成垂直梳状驱动致动器的梳状电极。 组合平面和垂直梳状驱动致动器，可移动元件是可控的，以执行二维光栅扫描运动。

公开(公告)号：US20090092161A1

公开(公告)日：2009-04-09

申请号：US12246917

申请日：2008-10-07

Applicant: Chang-Li Hung ,  Feng-Chun Yeh ,  Tsun-Hsiang Cheng

Inventor： Chang-Li Hung ,  Feng-Chun Yeh ,  Tsun-Hsiang Cheng

IPC: H01S3/13

CPC classification number: G03B21/28 ,  G02B26/105 ,  G03B21/00

Abstract: A laser pointer includes a human-machine interface disposed above the housing for users to control components inside the housing to decide patterns and size of the projecting image. The components consist of a frequency/phase control module, a driving energy control module, a laser beam generating module and a light scanning device. The frequency/phase control module controls the driving energy control module while the driving energy control module controls driving energy of the light scanning device. The size of the image is controlled by change of the amplitude of the light scanning device while the amplitude is changed along with the driving energy. The amplitude may also change along with the driving frequency. When the driving energy is fixed and the driving frequency is close to the resonant frequency, the amplitude increases. On the contrary, the amplitude decreases.

Abstract translation: 激光指示器包括设置在壳体上方的人机界面，用于使用户控制壳体内的组件以确定投影图像的图案和尺寸。 部件包括频率/相位控制模块，驱动能量控制模块，激光束产生模块和光扫描装置。 频率/相位控制模块控制驱动能量控制模块，同时驱动能量控制模块控制光扫描装置的驱动能量。 图像的大小由光扫描装置的振幅的变化控制，同时随着驱动能量的变化而变化。 振幅也可随着驱动频率的变化而变化。 当驱动能量固定并且驱动频率接近谐振频率时，振幅增大。 相反，振幅降低。

公开(公告)号：US07329930B2

公开(公告)日：2008-02-12

申请号：US10793877

申请日：2004-03-08

Applicant: Chang-Li Hung

Inventor： Chang-Li Hung

IPC: H01L27/14

CPC classification number: B81B3/0045 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro-electro-mechanical component comprising a movable element with comb electrodes, and two stationary elements with comb electrodes aligned and stacked on each other but electrically insulated by a layer of insulation material. The movable element is supported by multiple torsional hinges and suspended over a cavity such that the element can oscillate about an axis defined by the hinges. The comb electrodes of the movable element are interdigitated with the comb electrodes of one stationary element in the same plane to form an in-plane comb actuator. The comb electrodes of the movable element are also interdigitated in an elevated plane with the comb electrodes of another stationary element to form a vertical comb actuator. As a result, the micro-electro-mechanical component is both an in-plane actuator and a vertical comb actuator, or a multiple-plane actuator. Methods of fabricating such actuator are also described.

Abstract translation: 一种微电子机械部件，包括具有梳状电极的可移动元件和具有梳状电极的两个固定元件，梳状电极彼此对准并堆叠，但是被绝缘材料层电绝缘。 可移动元件由多个扭转铰链支撑并悬挂在空腔上，使得元件可以围绕由铰链限定的轴线摆动。 可移动元件的梳状电极与同一平面中的一个固定元件的梳状电极相互交错，以形成平面内的梳状致动器。 可移动元件的梳状电极也在另一个固定元件的梳状电极的高架平面上交错形成垂直梳状致动器。 结果，微电子机械部件既是面内致动器，也是垂直梳状致动器，或者是多平面致动器。 还描述了制造这种致动器的方法。

公开(公告)号：US07972014B2

公开(公告)日：2011-07-05

申请号：US12186234

申请日：2008-08-05

Applicant: Chang-Li Hung ,  Ta-Wei Lin

Inventor： Chang-Li Hung ,  Ta-Wei Lin

IPC: G03B21/14

CPC classification number: H04N9/317 ,  H04N9/3129 ,  H04N9/3194

Abstract: A scanning projection apparatus for displaying image comprises a light source for generating a light beam, a beam scanner which deflects the light beam to project a two dimensional image field, a modulation means for modulating the intensity of the light beam, and a sensor to detect the scanned light beam. The light source may consist of a plurality of semiconductor lasers and/or solid state lasers to generate light beams with wavelengths of red, green and blue colors aligned into a single light path. The image field is divided into an active image field for displaying image and a dark field in the perimeter of the image field wherein the light beam is switched off to reduce inherent image defects. The sensor is positioned outside the active image field to detect a scan line once per image frame to eliminate image distortion due to phase difference between the actual and the predicted positions of the scanned beam, and to detect both the horizontal and the vertical scanning operations of the beam scanner for safety precaution.

Abstract translation: 用于显示图像的扫描投影设备包括用于产生光束的光源，使光束偏转以投影二维图像场的光束扫描器，用于调制光束强度的调制装置和用于检测光束的传感器 扫描光束。 光源可以由多个半导体激光器和/或固态激光器组成，以产生对准到单个光路中的红色，绿色和蓝色波长的光束。 图像场被分成用于在图像场的周边中显示图像和暗场的有效图像场，其中关闭光束以减少固有的图像缺陷。 传感器位于有源图像场外部，以便每个图像帧检测一次扫描线，以消除由于扫描光束的实际和预测位置之间的相位差导致的图像失真，并且检测水平和垂直扫描操作 梁扫描仪用于安全防范。

公开(公告)号：US07971790B2

公开(公告)日：2011-07-05

申请号：US12246917

申请日：2008-10-07

Applicant: Chang-Li Hung ,  Feng-Chun Yeh ,  Tsun-Hsiang Cheng

Inventor： Chang-Li Hung ,  Feng-Chun Yeh ,  Tsun-Hsiang Cheng

IPC: G06K7/10 ,  G06K7/14

CPC classification number: G03B21/28 ,  G02B26/105 ,  G03B21/00

Abstract: A laser pointer includes a human-machine interface disposed above the housing for users to control components inside the housing to decide patterns and size of the projecting image. The components consist of a frequency/phase control module, a driving energy control module, a laser beam generating module and a light scanning device. The frequency/phase control module controls the driving energy control module while the driving energy control module controls driving energy of the light scanning device. The size of the image is controlled by change of the amplitude of the light scanning device while the amplitude is changed along with the driving energy. The amplitude may also change along with the driving frequency. When the driving energy is fixed and the driving frequency is close to the resonant frequency, the amplitude increases. On the contrary, the amplitude decreases.

Abstract translation: 激光指示器包括设置在壳体上方的人机界面，用于使用户控制壳体内的组件以确定投影图像的图案和尺寸。 部件包括频率/相位控制模块，驱动能量控制模块，激光束产生模块和光扫描装置。 频率/相位控制模块控制驱动能量控制模块，同时驱动能量控制模块控制光扫描装置的驱动能量。 图像的大小由光扫描装置的振幅的变化控制，同时随着驱动能量的变化而变化。 振幅也可随着驱动频率的变化而变化。 当驱动能量固定并且驱动频率接近谐振频率时，振幅增大。 相反，振幅降低。

公开(公告)号：US20060008934A1

公开(公告)日：2006-01-12

申请号：US11224119

申请日：2005-09-13

Applicant: Chang-Li Hung

Inventor： Chang-Li Hung

IPC: H01L21/00

CPC classification number: B81B3/0045 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro-electro-mechanical component comprising a movable element with comb electrodes, and two stationary elements with comb electrodes aligned and stacked on each other but electrically insulated by a layer of insulation material. The movable element is supported by multiple torsional hinges and suspended over a cavity such that the element can oscillate about an axis defined by the hinges. The comb electrodes of the movable element are interdigitated with the comb electrodes of one stationary element in the same plane to form an in-plane comb actuator. The comb electrodes of the movable element are also interdigitated in an elevated plane with the comb electrodes of another stationary element to form a vertical comb actuator. As a result, the micro-electro-mechanical component is both an in-plane actuator and a vertical comb actuator, or a multiple-plane actuator. Methods of fabricating such actuator are also described.

Abstract translation: 一种微电子机械部件，包括具有梳状电极的可移动元件和具有梳状电极的两个固定元件，梳状电极彼此对准并堆叠，但是被绝缘材料层电绝缘。 可移动元件由多个扭转铰链支撑并悬挂在空腔上，使得元件可以围绕由铰链限定的轴线摆动。 可移动元件的梳状电极与同一平面中的一个固定元件的梳状电极相互交错，以形成平面内的梳状致动器。 可移动元件的梳状电极也在另一个固定元件的梳状电极的高架平面上交错形成垂直梳状致动器。 结果，微电子机械部件既是面内致动器，也是垂直梳状致动器，或者是多平面致动器。 还描述了制造这种致动器的方法。

公开(公告)号：US20050194650A1

公开(公告)日：2005-09-08

申请号：US10793877

申请日：2004-03-08

Applicant: Chang-Li Hung

Inventor： Chang-Li Hung

IPC: H01L27/14 ,  H01L29/82 ,  H01L29/84

CPC classification number: B81B3/0045 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro-electro-mechanical component comprising a movable element with comb electrodes, and two stationary elements with comb electrodes aligned and stacked on each other but electrically insulated by a layer of insulation material. The movable element is supported by multiple torsional hinges and suspended over a cavity such that the element can oscillate about an axis defined by the hinges. The comb electrodes of the movable element are interdigitated with the comb electrodes of one stationary element in the same plane to form an in-plane comb actuator. The comb electrodes of the movable element are also interdigitated in an elevated plane with the comb electrodes of another stationary element to form a vertical comb actuator. As a result, the micro-electro-mechanical component is both an in-plane actuator and a vertical comb actuator, or a multiple-plane actuator. Methods of fabricating such actuator are also described.

Abstract translation: 一种微电子机械部件，包括具有梳状电极的可移动元件和具有梳状电极的两个固定元件，梳状电极彼此对准并堆叠，但是被绝缘材料层电绝缘。 可移动元件由多个扭转铰链支撑并悬挂在空腔上，使得元件可以围绕由铰链限定的轴线摆动。 可移动元件的梳状电极与同一平面中的一个固定元件的梳状电极相互交错，以形成平面内的梳状致动器。 可移动元件的梳状电极也在另一个固定元件的梳状电极的高架平面上交错形成垂直梳状致动器。 结果，微电子机械部件既是面内致动器，也是垂直梳状致动器，或者是多平面致动器。 还描述了制造这种致动器的方法。