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Invention Grant
US07245057B2 Micro-electromechanical structure resonator frequency adjustment using radiant energy trimming and laser/focused ion beam assisted deposition 有权
微机电结构谐振器频率调整采用辐射能量修整和激光/聚焦离子束辅助沉积

Micro-electromechanical structure resonator frequency adjustment using radiant energy trimming and laser/focused ion beam assisted deposition
Abstract:
The invention relates to a microbeam oscillator. Tuning of the oscillator is carried out by addition or subtraction of material to an oscillator member in order to change the mass of the oscillator member.
Abstract(Chinese):

本发明涉及一种微波振荡器。 振荡器的调谐是通过对振荡器元件进行加法或减法来实现的，以便改变振荡器元件的质量。

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