Invention Grant
- Patent Title: Micro-package, multi-stack micro-package, and manufacturing method therefor
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Application No.: US11396544Application Date: 2006-04-04
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Publication No.: US07285865B2Publication Date: 2007-10-23
- Inventor: Jong-oh Kwon , Woon-bae Kim , In-sang Song , Ji-hyuk Lim , Suk-jin Ham , Byung-gil Jeong
- Applicant: Jong-oh Kwon , Woon-bae Kim , In-sang Song , Ji-hyuk Lim , Suk-jin Ham , Byung-gil Jeong
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronic Co., Ltd.
- Current Assignee: Samsung Electronic Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion Pllc.
- Priority: KR10-2005-0064314 20050715
- Main IPC: H01L23/34
- IPC: H01L23/34 ; H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
A micro package, a multi-stack micro package, and a manufacture method therefor are provided. A micro package according to the present invention includes a device substrate for mounting a devices, being a circuit module; a protection cap for protecting the device; bonding substances which, formed by patterning on predetermined areas on the device substrate, bond the device substrate and the protection cap; layers formed on a portion of the device substrate and a portion of the protection cap and exterior sides of the bonding substances; vias which are formed by etching away another portion of the protection cap, and electrically connected to an upper surface of the device substrate through the bonding substances; under barrier metals (UBMs) formed on the vias; and solder bumpers, being connection terminals for an external signal, formed on the UBMs. As stated above, the present invention has advantages of guaranteeing the hermetical sealing since the above layers prevent moisture absorption from outside at the same time of lowering possibility of damages to the device inside the package since the processing temperature drops below 150° upon wafer bonding due to the use of the polymer substance as a bonding substance.
Public/Granted literature
- US20070012655A1 Micro-package, multi-stack micro-package, and manufacturing method therefor Public/Granted day:2007-01-18
Information query
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