Invention Grant
US07338575B2 Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
有权
用于微波等离子体发生器的烃介电传热流体
- Patent Title: Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
- Patent Title (中): 用于微波等离子体发生器的烃介电传热流体
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Application No.: US10937946Application Date: 2004-09-10
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Publication No.: US07338575B2Publication Date: 2008-03-04
- Inventor: Richard E. Pingree, Jr. , Michael Bruce Colson , Michael Silbert
- Applicant: Richard E. Pingree, Jr. , Michael Bruce Colson , Michael Silbert
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Cantor Colburn LLP
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306
Abstract:
A process and apparatus for cooling a plasma tube generally includes flowing a hydrocarbon dielectric heat transfer fluid into a space defined by the plasma tube and a concentric tube surrounding the plasma tube. In one embodiment, the hydrocarbon fluid is selected to have a dissipation factor less than 0.002 and a thermal efficiency coefficient greater than or equal to 1.30 kJ/kg*K.
Public/Granted literature
- US20060054281A1 Hydrocarbon dielectric heat transfer fluids for microwave plasma generators Public/Granted day:2006-03-16
Information query
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