Invention Grant
- Patent Title: Non-axisymmetric charged-particle beam system
- Patent Title (中): 非轴对称带电粒子束系统
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Application No.: US11145804Application Date: 2005-06-06
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Publication No.: US07381967B2Publication Date: 2008-06-03
- Inventor: Ronak J. Bhatt , Chiping Chen , Jing Zhou
- Applicant: Ronak J. Bhatt , Chiping Chen , Jing Zhou
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Gauthier & Connors LLP
- Main IPC: B01D59/44
- IPC: B01D59/44 ; H01J49/00
Abstract:
The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.
Public/Granted literature
- US20060017002A1 Non-axisymmetric charged-particle beam system Public/Granted day:2006-01-26
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