Invention Grant
- Patent Title: Surface contamination detection
- Patent Title (中): 表面污染检测
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Application No.: US11397064Application Date: 2006-04-04
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Publication No.: US07397560B2Publication Date: 2008-07-08
- Inventor: Karen L. Seaward , David T. Dutton
- Applicant: Karen L. Seaward , David T. Dutton
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01J3/443
- IPC: G01J3/443 ; G01N21/73 ; G01N21/94

Abstract:
A contamination detector in accordance with one embodiment of the invention includes a plasma generation system operable to direct an atmospheric plasma discharge towards a surface. The contamination detector further includes a light capture system to capture light generated by interaction of the atmospheric plasma discharge with the surface. The light capture system guides the captured light to an optical detection system configured to detect a contaminant.
Public/Granted literature
- US20070229819A1 Surface contamination detection Public/Granted day:2007-10-04
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