Invention Grant
- Patent Title: Gas distributor for ion source
- Patent Title (中): 离子源气体分配器
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Application No.: US11622981Application Date: 2007-01-12
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Publication No.: US07476869B2Publication Date: 2009-01-13
- Inventor: David M. Burtner , Scott A. Townsend , Daniel E. Siegfried
- Applicant: David M. Burtner , Scott A. Townsend , Daniel E. Siegfried
- Applicant Address: US NY Woodbury
- Assignee: Veeco Instruments, Inc.
- Current Assignee: Veeco Instruments, Inc.
- Current Assignee Address: US NY Woodbury
- Agency: Hensley Kim & Holzer, LLC
- Main IPC: H01J49/10
- IPC: H01J49/10 ; H01J37/08 ; H01J7/24

Abstract:
A gas distributor is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the gas distributor, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The gas distributor may be mounted to a thermal control plate in the anode assembly with several set screws. The gas distributor may be disk-shaped with counterbores in a surface to recess the heads of the set screws. Alternately, the gas distributor may be clamped or held in place by other structures or components of the ion source.
Public/Granted literature
- US20070273289A1 Gas Distributor for Ion Source Public/Granted day:2007-11-29
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