Invention Grant
- Patent Title: Scanning simultaneous phase-shifting interferometer
- Patent Title (中): 扫描同时移相干涉仪
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Application No.: US11770582Application Date: 2007-06-28
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Publication No.: US07561279B2Publication Date: 2009-07-14
- Inventor: Raymond Castonguay , Piotr Szwaykowski
- Applicant: Raymond Castonguay , Piotr Szwaykowski
- Applicant Address: US AZ Tucson
- Assignee: Engineering Synthesis Design, Inc.
- Current Assignee: Engineering Synthesis Design, Inc.
- Current Assignee Address: US AZ Tucson
- Agency: Hayes Soloway, P.C.
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
An optical measuring apparatus for comprising, in combination, a polarization type interferometer including a polarization type beam splitter in which a polarized beam of light is split into orthogonally polarized reference and test beams, an array of detectors arranged in a line for creating a plurality of phase shifting interferograms, and a scanning device for moving the object in a direction perpendicular to a long axis of the detectors.
Public/Granted literature
- US20080043224A1 SCANNING SIMULTANEOUS PHASE-SHIFTING INTERFEROMETER Public/Granted day:2008-02-21
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