Invention Grant
- Patent Title: Thermal transfer sheet for ion source
- Patent Title (中): 离子源热转印片
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Application No.: US11622989Application Date: 2007-01-12
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Publication No.: US07566883B2Publication Date: 2009-07-28
- Inventor: David M. Burtner , Scott A. Townsend , Daniel E. Siegfried
- Applicant: David M. Burtner , Scott A. Townsend , Daniel E. Siegfried
- Applicant Address: US CO Fort Collins
- Assignee: Veeco Instruments, Inc.
- Current Assignee: Veeco Instruments, Inc.
- Current Assignee Address: US CO Fort Collins
- Agency: Hensley Kim & Holzer, LLC
- Main IPC: H01J49/10
- IPC: H01J49/10 ; H01J37/08 ; H01J7/24

Abstract:
One or more thermal transfer sheets are easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal transfer sheets, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal transfer sheets may be interposed between the consumable components within the anode assembly. The thermal transfer sheets may be thermally conductive and either electrically insulating or conductive.
Public/Granted literature
- US20070125966A1 Thermal Transfer Sheet for Ion Source Public/Granted day:2007-06-07
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