Invention Grant
- Patent Title: Micro-electromechanical system (MEMS) switch
- Patent Title (中): 微机电系统(MEMS)开关
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Application No.: US11317960Application Date: 2005-12-22
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Publication No.: US07602261B2Publication Date: 2009-10-13
- Inventor: Tsung-Kuan Allen Chou , Quan Tran
- Applicant: Tsung-Kuan Allen Chou , Quan Tran
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01P1/10
- IPC: H01P1/10

Abstract:
An electromechanical switch includes an actuation electrode, a cantilever electrode, a contact, a suspended conductor, and a signal line. The actuation electrode is mounted to a substrate, the cantilever electrode is suspended proximate to the actuation electrode, and the contact is mounted to the cantilever electrode. The suspended conductor is coupled to the contact and straddles a portion of the cantilever electrode. The signal line is positioned to form a closed circuit with the contact and the suspended conductor when an actuation voltage is applied between the actuation electrode and the cantilever electrode.
Public/Granted literature
- US20070146095A1 Micro-electromechanical system (MEMS) switch Public/Granted day:2007-06-28
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