Invention Grant
US07602261B2 Micro-electromechanical system (MEMS) switch 有权
微机电系统(MEMS)开关

Micro-electromechanical system (MEMS) switch
Abstract:
An electromechanical switch includes an actuation electrode, a cantilever electrode, a contact, a suspended conductor, and a signal line. The actuation electrode is mounted to a substrate, the cantilever electrode is suspended proximate to the actuation electrode, and the contact is mounted to the cantilever electrode. The suspended conductor is coupled to the contact and straddles a portion of the cantilever electrode. The signal line is positioned to form a closed circuit with the contact and the suspended conductor when an actuation voltage is applied between the actuation electrode and the cantilever electrode.
Public/Granted literature
Information query
Patent Agency Ranking
0/0