Invention Grant
US07646203B2 Defect detection system with multilevel output capability and method thereof
有权
具有多级输出能力的缺陷检测系统及其方法
- Patent Title: Defect detection system with multilevel output capability and method thereof
- Patent Title (中): 具有多级输出能力的缺陷检测系统及其方法
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Application No.: US11778635Application Date: 2007-07-16
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Publication No.: US07646203B2Publication Date: 2010-01-12
- Inventor: Chien-Kuo Wang , Tai-Chi Kao , Tsuoe-Hsiang Liao , Yuan-Che Lee , Yu-Ming Sun
- Applicant: Chien-Kuo Wang , Tai-Chi Kao , Tsuoe-Hsiang Liao , Yuan-Che Lee , Yu-Ming Sun
- Applicant Address: TW Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Main IPC: H01H31/02
- IPC: H01H31/02

Abstract:
A defect detection system and related method take advantage of multilevel detection technique for detecting defects on an integrated circuit. The defect detection system utilizes an analog-to-digital converter for converting an analog sensing signal into an output code having a plurality of bits. The defect detection methods include an open test method and a short test method. The open and short test methods both include a calibrating method and a testing method individually. The calibrating method functions to determine a preset reference voltage for the analog-to-digital converter based on a predetermined code. The testing method makes use of the preset reference voltage and the predetermined code for generating the output code having a plurality of bits. The output code is then utilized to determine whether or not there are open or short defects on the integrated circuit and to classify the defects.
Public/Granted literature
- US20090021266A1 DEFECT DETECTION SYSTEM WITH MULTILEVEL OUTPUT CAPABILITY AND METHOD THEREOF Public/Granted day:2009-01-22
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