Invention Grant
- Patent Title: Focussing lens for charged particle beams
- Patent Title (中): 用于带电粒子束的聚焦透镜
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Application No.: US10587137Application Date: 2005-01-21
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Publication No.: US07652263B2Publication Date: 2010-01-26
- Inventor: Hans-Peter Feuerbaum
- Applicant: Hans-Peter Feuerbaum
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, L.L.P.
- Priority: EP04001221 20040121
- International Application: PCT/EP2005/000598 WO 20050121
- International Announcement: WO2005/071708 WO 20050804
- Main IPC: H01J37/28
- IPC: H01J37/28

Abstract:
A focussing lens for focussing a charged particle beam onto a specimen at a predetermined landing angle. The focussing lens comprises at least one first electrode having a first aperture to generate a focussing electric field for focussing the charged particle beam onto the specimen and a correcting electrode having a curved surface to compensate for landing angle dependent distortions of the focussing electric field caused by the specimen. With the curved surface of the correcting electrode, it is possible to improve the focussing of a charged particle beam at landing angles that differ from the perpendicular landing angle.
Public/Granted literature
- US20070262255A1 Focussing Lens for Charged Particle Beams Public/Granted day:2007-11-15
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