Invention Grant
- Patent Title: Device for spin-coating substrates
- Patent Title (中): 旋涂底物的装置
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Application No.: US11550980Application Date: 2006-10-19
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Publication No.: US07661385B2Publication Date: 2010-02-16
- Inventor: Dirk Hoffmann
- Applicant: Dirk Hoffmann
- Applicant Address: DE Singen
- Assignee: SSE Sister Semiconductor Equipment GmbH
- Current Assignee: SSE Sister Semiconductor Equipment GmbH
- Current Assignee Address: DE Singen
- Agency: Burr & Brown
- Priority: DE102004019731 20040420
- Main IPC: B05C13/00
- IPC: B05C13/00

Abstract:
A device for spin-coating substrates with liquid media is provided, including a rotatable substrate plate for horizontally supporting a substrate, and a covering unit for covering the substrate during a distribution operation of the liquid medium by means of rotation of the substrate holder. The substrate holder is adapted to be joined tightly to the covering unit, so that passage holes arranged circumferentially on the substrate holder so that an internal coating space, defined by the covering unit and the substrate holder, is in fluid communication with the environment outside the internal space.
Public/Granted literature
- US20070107657A1 DEVICE FOR SPIN-COATING SUBSTRATES Public/Granted day:2007-05-17
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