Invention Grant
- Patent Title: Apparatus for observing a sample with a particle beam and an optical microscope
- Patent Title (中): 用粒子束和光学显微镜观察样品的装置
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Application No.: US12026419Application Date: 2008-02-05
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Publication No.: US07671333B2Publication Date: 2010-03-02
- Inventor: Alexandra Valerievna Agronskaja , Hans Casper Gerritsen , Adrianus Johannes Verkleij , Abraham Johannes Koster
- Applicant: Alexandra Valerievna Agronskaja , Hans Casper Gerritsen , Adrianus Johannes Verkleij , Abraham Johannes Koster
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Griner, LLP
- Agent Michael O. Scheinberg; David Griner
- Priority: EP07101725 20070205
- Main IPC: G01N13/12
- IPC: G01N13/12 ; H01J37/20 ; H01J37/28 ; H01J37/244

Abstract:
An apparatus for observing a sample (1) with a TEM column and an optical high resolution scanning microscope (10). The sample position when observing the sample with the TEM column differs from the sample position when observing the sample with the optical microscope in that in the latter case the sample is tilted towards the light-optical microscope. By using an optical microscope of the scanning type, and preferably using monochromatic light, the lens elements (11) of the optical microscope facing the sample position can be sufficiently small to be positioned between the pole faces (8A, 8B) of the (magnetic) particle-optical objective lens (7). This is in contrast with the objective lens systems conventionally used in optical microscopes, which show a large diameter. Furthermore the optical microscope, or at least the parts (11) close to the sample, may be retractable so as to free space when imaging in TEM mode.
Public/Granted literature
- US20080210869A1 APPARATUS FOR OBSERVING A SAMPLE WITH A PARTICLE BEAM AND AN OPTICAL MICROSCOPE Public/Granted day:2008-09-04
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