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US07673580B2 Apparatus and method for coating polyimide layer 有权
聚酰亚胺涂层的设备和方法

Apparatus and method for coating polyimide layer
Abstract:
An apparatus for coating a polyimide layer includes a print table for receiving a substrate thereon, an inkjet head positioned over the print table and having a jetting surface with a plurality of nozzles for jetting polyimide liquid onto the substrate, and a polyimide liquid supply tank for supplying polyimide liquid, and a wiper movable from one side of the jetting surface to an other side of the jetting surface while the wiper contacts the jetting surface of the inkjet head.
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