Invention Grant
- Patent Title: Method of fabricating a hinge
- Patent Title (中): 制造铰链的方法
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Application No.: US11557110Application Date: 2006-11-07
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Publication No.: US07674392B2Publication Date: 2010-03-09
- Inventor: Hsien-Lung Ho
- Applicant: Hsien-Lung Ho
- Applicant Address: TW Yangmei Township, Taoyuan County
- Assignee: Touch Micro-System Technology Inc.
- Current Assignee: Touch Micro-System Technology Inc.
- Current Assignee Address: TW Yangmei Township, Taoyuan County
- Agent Winston Hsu
- Priority: TW95126954A 20060724
- Main IPC: C03C15/00
- IPC: C03C15/00

Abstract:
The present invention provides a method of fabricating a hinge. First, a wafer is provided, and a hinge region and at least two through regions are defined on the wafer. The wafer in the hinge region is partially removed from a bottom surface of the wafer. Subsequently, the wafer in the through regions is completely removed from a top surface of the wafer, and the hinge is formed. Thereafter, a wafer level test is performed on the hinge of the wafer. Next, an etching process is performed to adjust the shape of the hinge. According to the method of the present invention, the thickness of the hinge is no longer limited by the thickness of the wafer, and the hinge can accept the wafer level test.
Public/Granted literature
- US20080017612A1 METHOD OF FABRICATING A HINGE Public/Granted day:2008-01-24
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