Invention Grant
- Patent Title: Memory structure and method of making the same
- Patent Title (中): 内存结构和制作方法
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Application No.: US11949786Application Date: 2007-12-04
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Publication No.: US07682902B2Publication Date: 2010-03-23
- Inventor: Ching-Nan Hsiao , Pei-Ing Lee , Ming-Cheng Chang , Chung-Lin Huang , Hsi-Hua Chang , Chih-Hsiang Wu
- Applicant: Ching-Nan Hsiao , Pei-Ing Lee , Ming-Cheng Chang , Chung-Lin Huang , Hsi-Hua Chang , Chih-Hsiang Wu
- Applicant Address: TW Kueishan, Tao-Yuan Hsien
- Assignee: Nanya Technology Corp.
- Current Assignee: Nanya Technology Corp.
- Current Assignee Address: TW Kueishan, Tao-Yuan Hsien
- Agent Winston Hsu
- Priority: TW96121018A 20070611
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A memory structure disclosed in the present invention features a control gate and floating gates being positioned in recessed trenches. A method of fabricating the memory structure includes the steps of first providing a substrate having a first recessed trench. Then, a first gate dielectric layer is formed on the first recessed trench. A first conductive layer is formed on the first gate dielectric layer. After that, the first conductive layer is etched to form a spacer which functions as a floating gate on a sidewall of the first recessed trench. A second recessed trench is formed in a bottom of the first recessed trench. An inter-gate dielectric layer is formed on a surface of the spacer, a sidewall and a bottom of the second recessed trench. A second conductive layer formed to fill up the first and the second recessed trench.
Public/Granted literature
- US20080305593A1 MEMORY STRUCTURE AND METHOD OF MAKING THE SAME Public/Granted day:2008-12-11
Information query
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