Invention Grant
US07687312B2 Method of manufacturing hybrid structure of multi-layer substrates 有权
制造多层基板混合结构的方法

  • Patent Title: Method of manufacturing hybrid structure of multi-layer substrates
  • Patent Title (中): 制造多层基板混合结构的方法
  • Application No.: US11856867
    Application Date: 2007-09-18
  • Publication No.: US07687312B2
    Publication Date: 2010-03-30
  • Inventor: Chih-kuang Yang
  • Applicant: Chih-kuang Yang
  • Applicant Address: TW Hsinchu
  • Assignee: Princo Corp.
  • Current Assignee: Princo Corp.
  • Current Assignee Address: TW Hsinchu
  • Priority: TW95145488A 20061206
  • Main IPC: H01L21/00
  • IPC: H01L21/00
Method of manufacturing hybrid structure of multi-layer substrates
Abstract:
Disclosed is a method of manufacturing a hybrid structure of multi-layer substrates. The method comprises steps of: separating a border district of at least one metal layer connecting with a border district of the corresponding dielectric layer from adjacent metal layers and adjacent dielectric layers for each multi-layer substrate and connecting a separated border of a metal layer of one multi-layer substrate with a separated border district of a metal layer of another multi-layer substrate to form a connection section. The hybrid structure comprises at least a first multi-layer substrate and a second multi-layer substrate. At least one first metal layer is connected with at least one second metal layer to form a connection section.
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