Invention Grant
- Patent Title: Techniques for commensurate cusp-field for effective ion beam neutralization
- Patent Title (中): 用于有效离子束中和的相应尖点的技术
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Application No.: US11872576Application Date: 2007-10-15
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Publication No.: US07692139B2Publication Date: 2010-04-06
- Inventor: Bon Woong Koo , Frank Sinclair
- Applicant: Bon Woong Koo , Frank Sinclair
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/317
- IPC: H01J37/317

Abstract:
A system for ion beam neutralization includes a beamguide configured to transport an ion beam through a dipole field, a first array of magnets and a second array of magnets configured to generate a multi-cusp magnetic field, the first array of magnets being on a first side of the ion beam path and the second array of magnets being on a second side of the ion beam path. The system may further include a charged particle source having one or more apertures configured to inject charged particles into the ion beam. The system may furthermore align the one or more apertures with at least one of the first array of magnets and the second array of magnets to align the injected charged particles from the charged particle source with one or more magnetic regions for an effective charged particle diffusion into the ion beam.
Public/Granted literature
- US20090095894A1 TECHNIQUES FOR COMMENSURATE CUSP-FIELD FOR EFFECTIVE ION BEAM NEUTRALIZATION Public/Granted day:2009-04-16
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