公开(公告)号：US09012337B2

公开(公告)日：2015-04-21

申请号：US13270644

申请日：2011-10-11

Applicant: Shengwu Chang ,  Joseph C. Olson ,  Frank Sinclair ,  Matthew P. McClellan ,  Antonella Cucchetti

Inventor： Shengwu Chang ,  Joseph C. Olson ,  Frank Sinclair ,  Matthew P. McClellan ,  Antonella Cucchetti

IPC: H01L21/027 ,  H01L21/66 ,  H01L21/67

CPC classification number: H01L21/67109 ,  H01L21/67288

Abstract: A system and method for maintain a desired degree of platen flatness is disclosed. A laser system is used to measure the flatness of a platen. The temperature of the platen is then varied to achieve the desired level of flatness. In some embodiments, this laser system is only used during a set up period and the resulting desired temperature is then used during normal operation. In other embodiments, a laser system is used to measure the flatness of the platen, even while the workpiece is being processed.

Abstract translation: 公开了一种用于保持期望的压板平整度的系统和方法。 激光系统用于测量压板的平整度。 然后改变压板的温度以达到所需的平坦度水平。 在一些实施例中，该激光系统仅在建立周期期间使用，然后在正常操作期间使用所得到的期望温度。 在其他实施例中，即使在正在处理工件时，也使用激光系统来测量压板的平坦度。

公开(公告)号：US08933335B2

公开(公告)日：2015-01-13

申请号：US13273927

申请日：2011-10-14

Applicant: Gregory Citver ,  Frank Sinclair ,  D. Jeffrey Lischer ,  Nandishkumar Desai

Inventor： Gregory Citver ,  Frank Sinclair ,  D. Jeffrey Lischer ,  Nandishkumar Desai

IPC: H01B5/00 ,  H01F6/06

CPC classification number: H01F6/065 ,  Y10T29/49117

Abstract: A current lead with a configuration to reduce heat load transfer in an alternating electrical current (AC) environment is disclosed. The current lead may comprise a conductive material having a configuration for reducing heat load transfer across the current lead when an alternating electrical current (AC) is applied to the current lead. A temperature gradient a may be exhibited along a length of the current lead.

Abstract translation: 公开了一种具有在交流电流（AC）环境中减少热负荷传递的配置的电流引线。 电流引线可以包括导电材料，其具有当将交流电流（AC）施加到电流引线时用于减少穿过电流引线的热负荷传递的构造。 可以沿着电流引线的长度显示温度梯度a。

公开(公告)号：US08501624B2

公开(公告)日：2013-08-06

申请号：US12328096

申请日：2008-12-04

Applicant: Bon-Woong Koo ,  Victor Benveniste ,  Christopher A. Rowland ,  Craig R. Chaney ,  Frank Sinclair ,  Neil J. Bassom

Inventor： Bon-Woong Koo ,  Victor Benveniste ,  Christopher A. Rowland ,  Craig R. Chaney ,  Frank Sinclair ,  Neil J. Bassom

IPC: H01L21/302 ,  H01L21/461

CPC classification number: H01J27/022 ,  H01J37/08 ,  H01J37/3171 ,  H01J37/32357 ,  H01J37/32412 ,  H01J37/32422 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0815 ,  H01J2237/24514

Abstract: An ion source that utilizes exited and/or atomic gas injection is disclosed. In an ion beam application, the source gas can be used directly, as it is traditionally supplied. Alternatively or additionally, the source gas can be altered by passing it through a remote plasma source prior to being introduced to the ion source chamber. This can be used to create excited neutrals, heavy ions, metastable molecules or multiply charged ions. In another embodiment, multiple gasses are used, where one or more of the gasses are passed through a remote plasma generator. In certain embodiments, the gasses are combined in a single plasma generator before being supplied to the ion source chamber. In plasma immersion applications, plasma is injected into the process chamber through one or more additional gas injection locations. These injection locations allow the influx of additional plasma, produced by remote plasma sources external to the process chamber.

Abstract translation: 公开了一种利用离子源和/或原子气体注入的离子源。 在离子束施加中，源气体可以直接使用，如通常提供的。 或者或另外，源气体可以在被引入离子源室之前通过将其通过远程等离子体源来改变。 这可以用于产生兴奋的中性粒子，重离子，亚稳分子或多电荷离子。 在另一个实施例中，使用多个气体，其中一个或多个气体通过远程等离子体发生器。 在某些实施方案中，气体在被提供给离子源室之前组合在单个等离子体发生器中。 在等离子体浸渍应用中，通过一个或多个另外的气体注入位置将等离子体注入到处理室中。 这些注入位置允许通过处理室外部的远程等离子体源产生的附加等离子体的流入。

公开(公告)号：US08466431B2

公开(公告)日：2013-06-18

申请号：US12370555

申请日：2009-02-12

Applicant: James S. Buff ,  Svetlana Radovanov ,  Bon-Woong Koo ,  Wilhelm Platow ,  Frank Sinclair ,  D. Jeffrey Lischer ,  Craig R. Chaney ,  Steven Borichevsky ,  Eric R. Cobb ,  Mayur Jagtap ,  Kenneth H. Purser ,  Victor Benveniste ,  Shardul S. Patel

Inventor： James S. Buff ,  Svetlana Radovanov ,  Bon-Woong Koo ,  Wilhelm Platow ,  Frank Sinclair ,  D. Jeffrey Lischer ,  Craig R. Chaney ,  Steven Borichevsky ,  Eric R. Cobb ,  Mayur Jagtap ,  Kenneth H. Purser ,  Victor Benveniste ,  Shardul S. Patel

IPC: H01J37/15 ,  G21K5/10

CPC classification number: H01J37/3171 ,  H01J27/024 ,  H01J37/08 ,  H01J37/09 ,  H01J37/304 ,  H01J2237/0453 ,  H01J2237/0458 ,  H01J2237/083 ,  H01J2237/24542

Abstract: Techniques for improving extracted ion beam quality using high-transparency electrodes are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation. The apparatus may comprise an ion source for generating an ion beam, wherein the ion source comprises a faceplate with an aperture for the ion beam to travel therethrough. The apparatus may also comprise a set of extraction electrodes comprising at least a suppression electrode and a high-transparency ground electrode, wherein the set of extraction electrodes may extract the ion beam from the ion source via the faceplate, and wherein the high-transparency ground electrode may be configured to optimize gas conductance between the suppression electrode and the high-transparency ground electrode for improved extracted ion beam quality.

Abstract translation: 公开了使用高透明电极提高离子束质量的技术。 在一个特定的示例性实施例中，技术可以被实现为用于离子注入的装置。 该装置可以包括用于产生离子束的离子源，其中离子源包括具有离子束穿过其中的孔的面板。 该装置还可以包括至少包括抑制电极和高透明度接地电极的一组提取电极，其中所述提取电极组可以经由面板从离子源提取离子束，并且其中高透明度接地 电极可以被配置为优化抑制电极和高透明度接地电极之间的气体传导，以改善提取的离子束质量。

公开(公告)号：US08436318B2

公开(公告)日：2013-05-07

申请号：US12754258

申请日：2010-04-05

Applicant: Frank Sinclair ,  Costel Biloiu ,  Bon-Woong Koo ,  Victor Benveniste ,  Shardul Patel

Inventor： Frank Sinclair ,  Costel Biloiu ,  Bon-Woong Koo ,  Victor Benveniste ,  Shardul Patel

IPC: H01J27/00

CPC classification number: H01J37/32495 ,  H01J27/16 ,  H01J37/08 ,  H01J37/3171 ,  H01J37/321 ,  H01J37/32412 ,  H01J37/32422 ,  H01J37/32522 ,  H01J2237/022 ,  H01J2237/0266 ,  H01J2237/0817

Abstract: An RF ion source utilizing a heating/RF-shielding element for controlling the temperature of an RF window and to act as an RF shielding element for the RF ion source. When the heating/RF shielding element is in a heating mode, it suppresses formation of unwanted deposits on the RF window which negatively impacts the transfer of RF energy from an RF antenna to a plasma chamber. When the heating/RF-shielding element is in a shielding mode, it provides an electrostatic shielding for the RF ion source.

Abstract translation: RF离子源，其利用加热/ RF屏蔽元件来控制RF窗口的温度并用作RF离子源的RF屏蔽元件。 当加热/ RF屏蔽元件处于加热模式时，它抑制在RF窗口上形成不需要的沉积物，这对RF能量从RF天线到等离子体室的转移产生负面影响。 当加热/ RF屏蔽元件处于屏蔽模式时，它为RF离子源提供静电屏蔽。

公开(公告)号：US20130001414A1

公开(公告)日：2013-01-03

申请号：US13175404

申请日：2011-07-01

Applicant: Victor M. Benveniste ,  Frank Sinclair ,  Svetlana Radovanov ,  Bon-Woong Koo

Inventor： Victor M. Benveniste ,  Frank Sinclair ,  Svetlana Radovanov ,  Bon-Woong Koo

IPC: H01J49/10

CPC classification number: H01J37/05 ,  H01J37/1472 ,  H01J37/3171 ,  H01J49/30 ,  H01J2237/055 ,  H01J2237/057

Abstract: A system for producing a mass analyzed ion beam for implanting into a workpiece, includes an extraction plate having a set of apertures having a longitudinal axis of the aperture. The set of apertures are configured to extract ions from an ion source to form a plurality of beamlets. The system also includes an analyzing magnet region configured to provide a magnetic field to deflect ions in the beamlets in a first direction that is generally perpendicular to the longitudinal axis of the apertures. The system further includes a mass analysis plate having a set of apertures configured to transmit first ion species having a first mass/charge ratio and to block second ion species having a second mass/charge ratio and a workpiece holder configured to move with respect to the mass analysis plate along the first direction.

Abstract translation: 用于生产用于植入工件的质量分析离子束的系统包括具有一组具有孔的纵向轴线的孔的抽出板。 该组孔被构造成从离子源提取离子以形成多个子束。 该系统还包括分析磁体区域，其被配置为提供磁场以沿着大致垂直于孔的纵向轴线的第一方向偏转子束中的离子。 该系统还包括质量分析板，该质量分析板具有一组孔口，其被配置为透射具有第一质量/带电比的第一离子种类并阻挡具有第二质量/加料比的第二离子种类和被配置为相对于 质量分析板沿第一方向。

公开(公告)号：US20120293070A1

公开(公告)日：2012-11-22

申请号：US13108052

申请日：2011-05-16

Applicant: Peter Kurunczi ,  Frank Sinclair ,  Costel Biloiu ,  Ludovic Godet ,  Ernest Allen

Inventor： Peter Kurunczi ,  Frank Sinclair ,  Costel Biloiu ,  Ludovic Godet ,  Ernest Allen

IPC: H05H1/24

CPC classification number: H01J37/08 ,  H01J37/3171 ,  H01J37/3211 ,  H01J37/32119 ,  H01J37/32669

Abstract: A plasma processing apparatus and method are disclosed which create a uniform plasma within an enclosure. In one embodiment, a conductive or ferrite material is used to influence a section of the antenna, where a section is made up of portions of multiple coiled segments. In another embodiment, a ferrite material is used to influence a portion of the antenna. In another embodiment, plasma uniformity is improved by modifying the internal shape and volume of the enclosure.

Abstract translation: 公开了一种等离子体处理装置和方法，其在外壳内产生均匀的等离子体。 在一个实施例中，导电或铁氧体材料用于影响天线的一部分，其中一部分由多个线圈段的部分组成。 在另一个实施例中，铁氧体材料用于影响天线的一部分。 在另一个实施例中，通过改变外壳的内部形状和体积来提高等离子体的均匀性。

公开(公告)号：US20120292285A1

公开(公告)日：2012-11-22

申请号：US13111657

申请日：2011-05-19

Applicant: Alexander C. Kontos ,  Frank Sinclair ,  Anthony Renau

Inventor： Alexander C. Kontos ,  Frank Sinclair ,  Anthony Renau

IPC: G11B5/84 ,  C23C14/48 ,  C23C14/04

CPC classification number: G11B5/855

Abstract: A method of patterning a substrate, comprises patterning a photoresist layer disposed on the substrate using imprint lithography and etching exposed portions of a hard mask layer disposed between the patterned photoresist layer and the substrate. The method may also comprise implanting ions into a magnetic layer in the substrate while the etched hard mask layer is disposed thereon.

Abstract translation: 图案化衬底的方法包括使用压印光刻图案化设置在衬底上的光致抗蚀剂层，并蚀刻设置在图案化的光致抗蚀剂层和衬底之间的硬掩模层的暴露部分。 该方法还可以包括将离子注入到衬底中的磁性层中，同时将蚀刻的硬掩模层设置在其上。

公开(公告)号：US08263944B2

公开(公告)日：2012-09-11

申请号：US12340812

申请日：2008-12-22

Applicant: John Bon-Woong Koo ,  David J. Twiss ,  Chris Campbell ,  Frank Sinclair ,  Alexander S. Perel ,  Craig R. Chaney ,  Wilhelm P. Platow ,  Eric R. Cobb

Inventor： John Bon-Woong Koo ,  David J. Twiss ,  Chris Campbell ,  Frank Sinclair ,  Alexander S. Perel ,  Craig R. Chaney ,  Wilhelm P. Platow ,  Eric R. Cobb

IPC: H01J27/00

CPC classification number: H01J27/08 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/006 ,  H01J2237/022 ,  H01J2237/061

Abstract: In an ion implanter, an inert gas is directed at a cathode assembly near an ion source chamber via a supply tube. The inert gas is provided with a localized directional flow toward the cathode assembly to reduce unwanted concentrations of cleaning or dopant gases introduced into the ion source chamber, thereby reducing the effects of unwanted filament growth in the cathode assembly and extending the manufacturing life of the ion source.

Abstract translation: 在离子注入机中，惰性气体通过供应管被引导到离子源室附近的阴极组件。 向惰性气体提供朝向阴极组件的局部定向流，以减少引入离子源室的清洁或掺杂气体的不期望浓度，从而减少阴极组件中不想要的细丝生长的影响并延长离子的制造寿命 资源。

公开(公告)号：US08258489B2

公开(公告)日：2012-09-04

申请号：US12750893

申请日：2010-03-31

Applicant: Frank Sinclair

Inventor： Frank Sinclair

IPC: H01J37/00 ,  H01J37/317

CPC classification number: H01J37/244 ,  H01J37/304 ,  H01J37/3171 ,  H01J2237/24507 ,  H01J2237/24585 ,  H01J2237/30472 ,  H01J2237/31703

Abstract: An energy contamination detection apparatus includes a membrane and a charge collection plate disposed at a distance from the membrane. The membrane is configured to receive an ion beam and allow a portion of the ion beam having energy levels above a desired energy level to pass therethrough toward the charge collection plate and absorb or reflect portions of the ion beam having energy levels at or below the desired energy level. A voltage source is electrically coupled to the charge collection plate for providing a bias voltage to the charge collection plate. A detection circuit is coupled to the charge collection plate and is configured to detect energy contamination based on an amount of charge collected on the charge collection plate.

Abstract translation: 能量污染检测装置包括设置在与膜隔开一定距离处的膜和电荷收集板。 膜被配置为接收离子束并且允许具有高于期望能级的能量级的一部分离子束通过其中朝向电荷收集板，并吸收或反射具有等于或低于期望值的能级的离子束的部分 能级。 电压源电耦合到电荷收集板，用于向电荷收集板提供偏置电压。 检测电路耦合到电荷收集板，并且被配置为基于在电荷收集板上收集的电荷量来检测能量污染。