Invention Grant
US07695598B2 Coater having substrate cleaning device and coating deposition methods employing such coater
有权
涂布机具有基板清洁装置和使用这种涂布机的涂布沉积方法
- Patent Title: Coater having substrate cleaning device and coating deposition methods employing such coater
- Patent Title (中): 涂布机具有基板清洁装置和使用这种涂布机的涂布沉积方法
-
Application No.: US11750722Application Date: 2007-05-18
-
Publication No.: US07695598B2Publication Date: 2010-04-13
- Inventor: Klaus Hartig
- Applicant: Klaus Hartig
- Applicant Address: US MN Eden Prairie
- Assignee: Cardinal CG Company
- Current Assignee: Cardinal CG Company
- Current Assignee Address: US MN Eden Prairie
- Agency: Fredrikson & Byron, P.A.
- Main IPC: C23C14/56
- IPC: C23C14/56 ; C23F1/00

Abstract:
A coater having a substrate cleaning device is disclosed. The substrate cleaning device comprises an ion gun (i.e., an ion source) that is positioned beneath a path of substrate travel (e.g., beneath a substrate support) extending through the coater and that is adapted for treating a bottom major surface of a substrate. Certain embodiments involve an upward coating apparatus that is further along the path of substrate travel than the substrate cleaning device. In some embodiments of this nature, the upward coating apparatus is configured for depositing a photocatalytic coating upwardly onto the bottom major surface of the substrate. Certain embodiments of the invention involve a downward coating apparatus, wherein the substrate cleaning device is further along the path of substrate travel than the downward coating apparatus. Some embodiments involve an upward coating apparatus that is further along the path of substrate travel than the substrate cleaning device.
Public/Granted literature
- US20070234963A1 COATER HAVING SUBSTRATE CLEANING DEVICE AND COATING DEPOSITION METHODS EMPLOYING SUCH COATER Public/Granted day:2007-10-11
Information query
IPC分类: