Invention Grant
US07696843B2 MEMS filter device having a nanosize coupling element and manufacturing method thereof
失效
具有纳米尺寸耦合元件的MEMS滤波器件及其制造方法
- Patent Title: MEMS filter device having a nanosize coupling element and manufacturing method thereof
- Patent Title (中): 具有纳米尺寸耦合元件的MEMS滤波器件及其制造方法
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Application No.: US11570924Application Date: 2005-07-25
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Publication No.: US07696843B2Publication Date: 2010-04-13
- Inventor: Akinori Hashimura
- Applicant: Akinori Hashimura
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Pearne & Gordon LLP
- Priority: JP2004-218798 20040727
- International Application: PCT/JP2005/013582 WO 20050725
- International Announcement: WO2006/011449 WO 20060202
- Main IPC: H03H9/50
- IPC: H03H9/50 ; H03H9/05
Abstract:
An object of the invention is to provide a coupling element of an MEMS filter with design flexibility and minimization of mass loading effects. The invention provides a structure wherein the mass loading effects are not reflected on the MEMS filter characteristic by using a nanosize coupling element with a very small mass compared to a microsize MEMS resonator, such as a carbon nanotube (CNT), as a coupling element part.
Public/Granted literature
- US20080284544A1 Mems Filter Device and Manufacturing Method Thereof Public/Granted day:2008-11-20
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