Invention Grant
- Patent Title: Scintillator panel and radiation image sensor
- Patent Title (中): 闪烁面板和辐射图像传感器
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Application No.: US12213170Application Date: 2008-06-16
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Publication No.: US07705315B2Publication Date: 2010-04-27
- Inventor: Takuya Homme , Toshio Takabayashi , Hiroto Sato , Takaharu Suzuki , Yoshio Natsume
- Applicant: Takuya Homme , Toshio Takabayashi , Hiroto Sato , Takaharu Suzuki , Yoshio Natsume
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: Hamamatsu Photonics K.K.
- Current Assignee: Hamamatsu Photonics K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP10-171191 19980618; JPP1999-109635 19990416; JPP2001-339741 20011105; JPPCT/JP02/00732 20020130; JPP2002-062435 20020307; JPP2002-062468 20020307
- Main IPC: G01T1/00
- IPC: G01T1/00
Abstract:
An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.
Public/Granted literature
- US20080272314A1 Scintillator panel and radiation image sensor Public/Granted day:2008-11-06
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