Scintillator panel, radiation image sensor and methods of producing them
    3.
    发明授权
    Scintillator panel, radiation image sensor and methods of producing them 有权
    闪烁面板,辐射图像传感器及其制作方法

    公开(公告)号:US07087908B2

    公开(公告)日:2006-08-08

    申请号:US10363898

    申请日:2001-09-11

    Applicant: Takuya Homme

    Inventor: Takuya Homme

    CPC classification number: G01T1/2018

    Abstract: Scintillator panel (1) comprises a radiation transmitting substrate (5), which has heat resistance, a dielectric multilayer film mirror (6), as a light reflecting film and is formed on the radiation transmitting substrate (5), and a scintillator (10), disposed on the dielectric multilayer film mirror (6) and emits light by conversion of the radiation (30) that has been made to enter the radiation transmitting substrate (5) and has passed through the dielectric multilayer film mirror (6). Since the radiation transmitting substrate (5) has heat resistance, the dielectric multilayer film mirror (6) can be vapor deposited at a high temperature and, as a result, can be formed in a state of high reflectance. Also, unlike a metal film, the dielectric multilayer film mirror (6) will not corrode upon reacting with the scintillator (10).

    Abstract translation: 闪烁面板(1)包括具有耐热性的辐射透射基板(5),作为光反射膜的电介质多层膜反射镜(6),并形成在辐射透射基板(5)上,以及闪烁体(10) ),设置在电介质多层膜反射镜(6)上,并且通过已经进入辐射透射基板(5)的已经通过电介质多层膜反射镜(6)的辐射(30)发射光。 由于辐射透射基板(5)具有耐热性,所以可以在高温下气相沉积电介质多层膜反射镜(6),结果可以以高反射率的状态形成。 而且,与金属膜不同,电介质多层膜反射镜(6)在与闪烁体(10)反应时不会腐蚀。

    X-ray image pickup apparatus and method of making the same
    4.
    发明授权
    X-ray image pickup apparatus and method of making the same 有权
    X射线摄像装置及其制作方法

    公开(公告)号:US06747277B2

    公开(公告)日:2004-06-08

    申请号:US10214332

    申请日:2002-08-08

    CPC classification number: H01L27/14663 G01T1/2018 H01L27/14687

    Abstract: In an X-ray image pickup apparatus comprising first and second semiconductor image sensor chips 14A, 14C arranged adjacent each other on a base plate 20, and a single scintillator panel 40 disposed on the first and second semiconductor image sensor chips, respective planes including surfaces of photosensitive regions of the first and second semiconductor image sensor chips have normals intersecting at a predetermined angle.

    Abstract translation: 在包括在基板20上彼此相邻布置的第一和第二半导体图像传感器芯片14A,14C的X射线图像拾取装置和设置在第一和第二半导体图像传感器芯片上的单个闪烁体面板40,各个平面包括表面 第一和第二半导体图像传感器芯片的感光区域具有以预定角度相交的法线。

    Radiation image sensor
    5.
    发明授权
    Radiation image sensor 有权
    辐射图像传感器

    公开(公告)号:US06469305B2

    公开(公告)日:2002-10-22

    申请号:US09739425

    申请日:2000-12-18

    CPC classification number: G01T1/2002

    Abstract: A radiation image sensor has a scintillator panel and an imaging device, and the scintillator panel comprises a radiation-transparent substrate, a deliquescent scintillator formed on the substrate, and an elastic organic film covering the scintillator, the scintillator panel and imaging device being bonded to each other with a matching oil interposed therebetween, whereas side wall portions of the scintillator panel and imaging device are firmly attached to each other with a resin.

    Abstract translation: 辐射图像传感器具有闪烁体面板和成像装置,并且闪烁体面板包括辐射透明基板,形成在基板上的潮解闪烁体和覆盖闪烁体的弹性有机膜,闪烁体面板和成像装置粘合到 彼此之间具有匹配的油,而闪烁体面板和成像装置的侧壁部分用树脂牢固地彼此附接。

    Radiation detection device and method of making the same
    6.
    发明授权
    Radiation detection device and method of making the same 有权
    辐射检测装置及其制作方法

    公开(公告)号:US06262422B1

    公开(公告)日:2001-07-17

    申请号:US09247299

    申请日:1999-02-10

    CPC classification number: G01T1/2018

    Abstract: Light-receiving devices are two-dimensionally arranged on a substrate, bonding pads electrically connected to the light-receiving devices in the respective rows or columns via signal lines are arranged on the outer periphery of the substrate, and a protective passivation film is disposed on the light-receiving devices and signal lines, thereby forming a light-receiving device array. On the light-receiving surface of the light-receiving device array, a scintillator made of columnar crystals of CsI is deposited. On the other hand, a resin frame formed like an elongated frame is disposed inside the bonding pads. Inside this frame, a protective film in which an inorganic film is held between organic films made of Parylene is laminated. The outer periphery of the protective film is in close contact with the resin frame with the aid of the coating resin.

    Abstract translation: 光接收装置二维地布置在基板上,在基板的外周上布置有经由信号线电连接到相应列或列中的光接收装置的接合焊盘,并且保护钝化膜设置在 光接收装置和信号线,从而形成光接收装置阵列。 在光接收元件阵列的光接收表面上沉积由CsI的柱状晶体制成的闪烁体。 另一方面,形成为细长框架的树脂框架设置在接合焊盘的内部。 在该框架内,层叠保护膜,其中无机膜保持在由Parylene制成的有机膜之间。 借助于涂层树脂,保护膜的外周与树脂框架紧密接触。

    Scintillator panel
    7.
    发明授权
    Scintillator panel 有权
    闪烁面板

    公开(公告)号:US07897938B2

    公开(公告)日:2011-03-01

    申请号:US12640791

    申请日:2009-12-17

    Abstract: Comprising a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from said vapor deposition table; a second step of introducing said vapor deposition table having said substrate supported by said target-support element into a vapor deposition chamber of a CVD apparatus; and a third step of depositing an organic film by CVD method onto all surfaces of said substrate, provided with said scintillator, introduced into said vapor deposition chamber.

    Abstract translation: 包括在设置在气相沉积台上的靶支撑元件的至少三个突起上支撑由闪烁体形成的衬底以便保持距离所述气相沉积台的距离的第一步骤; 将具有由所述靶支撑元件支撑的所述基板的所述蒸镀台引入CVD装置的蒸镀室的第二工序; 以及第三步骤,通过CVD法将有机膜沉积到所述衬底的设置有所述闪烁体的所有表面上,并引入所述蒸镀室。

    SCINTILLATOR PANEL AND RADIATION IMAGE SENSOR
    10.
    发明申请
    SCINTILLATOR PANEL AND RADIATION IMAGE SENSOR 有权
    扫描面板和辐射图像传感器

    公开(公告)号:US20060038131A9

    公开(公告)日:2006-02-23

    申请号:US10217628

    申请日:2002-08-14

    CPC classification number: G01T1/202

    Abstract: An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.

    Abstract translation: 在闪烁体面板的a-C基板的一个表面上形成作为光反射膜的Ag膜。 Ag膜的整个表面被用于保护Ag膜的SiN膜覆盖。 在SiN膜的表面上形成具有将入射辐射转换为可见光的柱状结构的闪烁体。 闪烁体与基板一起被聚对二甲苯膜覆盖。

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