Invention Grant
- Patent Title: Devices in miniature for interferometric use and fabrication thereof
- Patent Title (中): 微型设备用于干涉仪使用和制造
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Application No.: US12009889Application Date: 2008-01-23
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Publication No.: US07710574B2Publication Date: 2010-05-04
- Inventor: Jeongsik Sin , Woo Ho Lee
- Applicant: Jeongsik Sin , Woo Ho Lee
- Applicant Address: US TX Austin
- Assignee: Board of Regents, The University of Texas System
- Current Assignee: Board of Regents, The University of Texas System
- Current Assignee Address: US TX Austin
- Agency: Chowdhury & Georgakis, PC
- Main IPC: G01J3/45
- IPC: G01J3/45
Abstract:
A device in miniature and fabrication of such a device for interferometric use is described, the device including a substrate with at least one deep reactive ion etching structure on at least one surface of the substrate forming an optical bench. The optical bench preferably comprises a moving stage, an actuator, one or more connector sockets and one or more optical components.
Public/Granted literature
- US20080285044A1 Devices in miniature for interferometric use and fabrication thereof Public/Granted day:2008-11-20
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