Invention Grant
- Patent Title: Metalized semiconductor substrates for raman spectroscopy
- Patent Title (中): 用于拉曼光谱的金属化半导体衬底
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Application No.: US12017720Application Date: 2008-01-22
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Publication No.: US07715003B2Publication Date: 2010-05-11
- Inventor: Eric Mazur , Eric Diebold , Steven Ebstein
- Applicant: Eric Mazur , Eric Diebold , Steven Ebstein
- Applicant Address: US MA Cambridge
- Assignee: President & Fellows of Harvard College
- Current Assignee: President & Fellows of Harvard College
- Current Assignee Address: US MA Cambridge
- Agency: Nutter McClennen & Fish LLP
- Agent Thomas J. Engellenner; Reza Mollaaghababa
- Main IPC: G01J3/44
- IPC: G01J3/44

Abstract:
In one aspect, the present invention generally provides methods for fabricating substrates for use in a variety of analytical and/or diagnostic applications. Such a substrate can be generated by exposing a semiconductor surface (e.g., silicon surface) to a plurality of short laser pulses to generate micron-sized, and preferably submicron-sized, structures on the surface. The structured surface can then be coated with a thin metallic layer, e.g., one having a thickness in a range of about 10 nm to about 1000 nm.
Public/Granted literature
- US20090046283A1 METALIZED SEMICONDUCTOR SUBSTRATES FOR RAMAN SPECTROSCOPY Public/Granted day:2009-02-19
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