Invention Grant
- Patent Title: Pattern measurement apparatus
- Patent Title (中): 图案测量装置
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Application No.: US12188791Application Date: 2008-08-08
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Publication No.: US07732792B2Publication Date: 2010-06-08
- Inventor: Ryoichi Matsuoka , Akihiro Onizawa , Akiyuki Sugiyama , Hidetoshi Morokuma , Yasutaka Toyoda
- Applicant: Ryoichi Matsuoka , Akihiro Onizawa , Akiyuki Sugiyama , Hidetoshi Morokuma , Yasutaka Toyoda
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2007-207344 20070809
- Main IPC: G01N23/00
- IPC: G01N23/00 ; H01J37/28 ; G21K7/00

Abstract:
Mutual compatibility is established between the measurement with a high magnification and the measurement in a wide region. A pattern measurement apparatus is proposed which adds identification information to each of fragments that constitute a pattern within an image obtained by the SEM, and which stores the identification information in a predetermined storage format. Here, the identification information is added to each fragment for distinguishing between one fragment and another fragment. According to the above-described configuration, it turns out that the identification information is added to each fragment on the SEM image which has possessed no specific identification information originally. As a result, it becomes possible to implement the SEM-image management based on the identification information.
Public/Granted literature
- US20090039263A1 PATTERN MEASUREMENT APPARATUS Public/Granted day:2009-02-12
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