Invention Grant
- Patent Title: Scanning electron microscope and calibration of image distortion
- Patent Title (中): 扫描电子显微镜和图像失真校准
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Application No.: US11866426Application Date: 2007-10-03
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Publication No.: US07750296B2Publication Date: 2010-07-06
- Inventor: Keiichiro Hitomi , Yasunari Sohda , Yoshinori Nakayama , Hajime Koyanagi
- Applicant: Keiichiro Hitomi , Yasunari Sohda , Yoshinori Nakayama , Hajime Koyanagi
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2006-274607 20061006
- Main IPC: G01J4/00
- IPC: G01J4/00 ; G01N23/00
Abstract:
In method and apparatus for obtaining a scanning electron microscope image devoid of distortion by measuring a scanning distortion and calibrating the scanning distortion, there occurs a problem that an error takes place in dimension control owing to a scanning distortion of an electron beam. To cope with this problem, an image is obtained by scanning a predetermined region with the electron beam, a plurality of regions are selected from the image, the pattern pitch is measured in each of the regions and a scanning distortion amount is calculated from the result of measurement and then corrected.
Public/Granted literature
- US20080210867A1 Scanning Electron Microscope and Calibration of Image Distortion Public/Granted day:2008-09-04
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