Invention Grant
- Patent Title: Multipole lens and method of fabricating same
- Patent Title (中): 多极透镜及其制造方法
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Application No.: US11784698Application Date: 2007-04-09
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Publication No.: US07755060B2Publication Date: 2010-07-13
- Inventor: Eiji Kawai
- Applicant: Eiji Kawai
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2006-110481 20060413
- Main IPC: G21K1/093
- IPC: G21K1/093 ; H01J1/50 ; H01J3/20

Abstract:
There is disclosed a multipole lens that can be machined with improved accuracy. A method of fabricating this lens is also disclosed. The multipole lens has a blank material from which polar elements will be fabricated. The blank material is sandwiched vertically between two layers of film-like insulator. The blank material and the two layers of film-like insulator are sandwiched vertically between an upper ring and a lower ring. These members are provided with injection holes for injecting a curing agent. The injection holes of these members are aligned. The curing agent is injected into the holes and cured. Then, the blank material is machined by electric discharge machining to form the polar elements.
Public/Granted literature
- US20070278416A1 Multipole lens and method of fabricating same Public/Granted day:2007-12-06
Information query