公开(公告)号：US10032600B2

公开(公告)日：2018-07-24

申请号：US15404618

申请日：2017-01-12

Applicant: Hermes Microvision Inc.

Inventor： Shuai Li

IPC: H01J37/143 ,  H01J37/28 ,  H01J3/20 ,  H01J37/09

Abstract: This invention provides a charged particle source, which comprises an emitter and means for generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

公开(公告)号：US08921804B2

公开(公告)日：2014-12-30

申请号：US13621720

申请日：2012-09-17

Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbH

Inventor： Jürgen Frosien

IPC: H01J3/20

CPC classification number: H01J37/067 ,  H01J37/141 ,  H01J2237/06325 ,  H01J2237/1501

Abstract: A condenser lens arrangement for an electron beam system is described. The condenser lens arrangement includes a magnetic condenser lens adapted for generating a magnetic condenser lens field, the condenser lens having a symmetry axis, and a magnetic deflector adapted for generating a magnetic deflector field. The deflector is configured so that the superposition of the magnetic condenser lens field and the magnetic deflector field results in an optical axis of the condenser lens arrangement being movable relative to the symmetry axis. Further, an electron beam optical system including a condenser lens arrangement and a method for moving a condenser lens are described.

Abstract translation: 描述了一种用于电子束系统的聚光透镜装置。 聚光透镜装置包括适于产生磁聚焦透镜场的聚光透镜，具有对称轴的聚光透镜，以及适于产生磁偏转器场的磁偏转器。 偏转器被配置为使得磁聚光透镜场和磁偏转器场的叠加导致聚光透镜装置的光轴相对于对称轴线是可移动的。 此外，描述了包括聚光透镜布置的电子束光学系统和用于移动聚光透镜的方法。

公开(公告)号：US08921803B2

公开(公告)日：2014-12-30

申请号：US13410646

申请日：2012-03-02

Applicant: David G. Welkie

Inventor： David G. Welkie

IPC: H01J3/20 ,  H01J37/12 ,  H01J49/06

CPC classification number: H01J49/061 ,  H01J37/12 ,  H01J37/1472 ,  H01J49/06 ,  H01J49/063 ,  H01J49/22 ,  H01J49/26

Abstract: A system includes an electrostatic lens in a path between a charged particle source and a detector. The electrostatic lens includes: a first electrode having a first aperture in the path aligned with a first axis; a second electrode in the path between the first electrode and the detector, having a second aperture in the path and aligned with a second axis that is parallel to the first axis and displaced from the first axis along a first direction; a third electrode in the path between the first electrode and the second electrode; and a potential generator coupled to the electrodes. During operation, the potential generator applies potentials to the first, second and third electrodes so that the electrostatic lens directs a beam of charged particles from the source propagating along the first axis to propagate along the second axis.

Abstract translation: 系统包括在带电粒子源和检测器之间的路径中的静电透镜。 静电透镜包括：第一电极，其具有与第一轴对准的路径中的第一孔; 所述第一电极和所述检测器之间的路径中的第二电极，在所述路径中具有第二孔，并且与第二轴对准，所述第二轴平行于所述第一轴线并沿着第一方向从所述第一轴线移位; 在第一电极和第二电极之间的路径中的第三电极; 以及耦合到电极的电位发生器。 在操作期间，电位发生器将电位施加到第一，第二和第三电极，使得静电透镜引导来自沿着第一轴传播的源的带电粒子束沿着第二轴传播。

公开(公告)号：US20140346368A1

公开(公告)日：2014-11-27

申请号：US14284128

申请日：2014-05-21

Applicant: NATIONAL UNIVERSITY OF SINGAPORE

Inventor： Anjam KHURSHEED

IPC: H01J3/18 ,  H01J3/20

CPC classification number: H01J3/18 ,  H01J3/021 ,  H01J3/027 ,  H01J3/20 ,  H01J37/063 ,  H01J37/065 ,  H01J37/26 ,  H01J2237/06333 ,  H01J2237/0635 ,  H01J2237/1534

Abstract: A gun configured to generate charged particles, comprising a ring-cathode (200) electrically configured to generate a charged particle beam; a lens arranged to focus the charged particle beam on a specimen; and at least one correction focusing electrode (1406) arranged to generate at least one electrostatic/magnetic field to further divergently/convergently focus the charged particle beam for correcting in-plane geometric aberrations associated with the lens, the focusing being based on the in-plane geometric aberrations associated with the lens. A related method is also disclosed.

Abstract translation: 一种配置成产生带电粒子的枪，包括电气配置以产生带电粒子束的环形阴极（200）; 透镜，布置成将带电粒子束聚焦在样本上; 以及至少一个校正聚焦电极（1406），其布置成产生至少一个静电/磁场，以进一步发散/收敛地聚焦带电粒子束，用于校正与透镜相关联的面内几何像差， 与透镜相关的平面几何像差。 还公开了相关方法。

公开(公告)号：US20130105702A1

公开(公告)日：2013-05-02

申请号：US13282135

申请日：2011-10-26

Applicant: Vladimir Balakin

Inventor： Vladimir Balakin

IPC: H01J3/34 ,  H01J3/20

CPC classification number: H05H13/04 ,  H05H7/10 ,  H05H2007/045 ,  H05H2277/11

Abstract: The invention comprises a charged particle beam acceleration and optional extraction method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous tumors. Novel design features of a synchrotron are described. Particularly, turning magnets, edge focusing magnets, concentrating magnetic field magnets, and extraction elements are described that minimize the overall size of the synchrotron, provide a tightly controlled proton beam, directly reduce the size of required magnetic fields, directly reduces required operating power, and allow continual acceleration of protons in a synchrotron even during a process of extracting protons from the synchrotron.

Abstract translation: 本发明包括带电粒子束加速度和与癌性肿瘤的带电粒子束放射治疗结合使用的任选的提取方法和装置。 描述了同步加速器的新颖设计特征。 特别地，描述了转子磁体，边缘聚焦磁体，集中磁场磁体和提取元件，其使得同步加速器的总体尺寸最小化，提供严格控制的质子束，直接减小所需磁场的尺寸，直接减少所需的操作功率， 并且即使在从同步加速器提取质子的过程中也允许同步加速器中的质子的持续加速。

公开(公告)号：US20120223244A1

公开(公告)日：2012-09-06

申请号：US13410646

申请日：2012-03-02

Applicant: David G. Welkie

Inventor： David G. Welkie

IPC: H01J3/20 ,  H01J3/18

CPC classification number: H01J49/061 ,  H01J37/12 ,  H01J37/1472 ,  H01J49/06 ,  H01J49/063 ,  H01J49/22 ,  H01J49/26

Abstract: A system includes an electrostatic lens in a path between a charged particle source and a detector. The electrostatic lens includes: a first electrode having a first aperture in the path aligned with a first axis; a second electrode in the path between the first electrode and the detector, having a second aperture in the path and aligned with a second axis that is parallel to the first axis and displaced from the first axis along a first direction; a third electrode in the path between the first electrode and the second electrode; and a potential generator coupled to the electrodes. During operation, the potential generator applies potentials to the first, second and third electrodes so that the electrostatic lens directs a beam of charged particles from the source propagating along the first axis to propagate along the second axis.

Abstract translation: 系统包括在带电粒子源和检测器之间的路径中的静电透镜。 静电透镜包括：第一电极，其具有与第一轴对准的路径中的第一孔; 所述第一电极和所述检测器之间的路径中的第二电极，在所述路径中具有第二孔，并且与第二轴对准，所述第二轴平行于所述第一轴线并沿着第一方向从所述第一轴线移位; 在第一电极和第二电极之间的路径中的第三电极; 以及耦合到电极的电位发生器。 在操作期间，电位发生器将电位施加到第一，第二和第三电极，使得静电透镜引导来自沿着第一轴传播的源的带电粒子束沿着第二轴传播。

公开(公告)号：US20120205550A1

公开(公告)日：2012-08-16

申请号：US13449435

申请日：2012-04-18

Applicant: Volker Drexel

Inventor： Volker Drexel

IPC: H01J3/20

CPC classification number: H01J37/145 ,  H01J37/141 ,  H01J37/1471

Abstract: An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of the magnetic lens exhibits a diameter Da which is larger than a diameter Di of the bore of the inner pole piece of the magnetic lens. The following relationship is satisfied: 1.5·Di≦Da≦3·Di. The lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis.

Abstract translation: 用于聚焦带电粒子的物镜包括磁性透镜和其组件相对于彼此移位的静电透镜。 磁性透镜的外极片的孔的直径Da大于磁性透镜的内极片的孔的直径Di。 满足以下关系：1.5·Di＆nlE; Da＆nlE; 3·Di。 内极靴的下端设置在距离外极极的内端至少2mm沿光轴方向的距离处。

公开(公告)号：US20110266455A1

公开(公告)日：2011-11-03

申请号：US12994126

申请日：2009-05-21

Applicant: Vladimir Yegorovich Balakin

Inventor： Vladimir Yegorovich Balakin

IPC: H01J3/20 ,  H01J3/14

CPC classification number: G21K1/087 ,  A61N2005/1087 ,  G21K1/093 ,  G21K1/14 ,  H05H7/04 ,  H05H7/08 ,  H05H7/10 ,  H05H13/04

Abstract: The invention comprises a charged particle beam extraction method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous tumors. The system uses a radio-frequency cavity system to induce betatron oscillation of a charged particle stream. Sufficient amplitude modulation of the charged particle stream causes the charged particle stream to hit a material, such as a foil. The foil decreases the energy of the charged particle stream, which decreases a radius of curvature of the charged particle stream in the synchrotron sufficiently to allow a physical separation of the reduced energy charged particle stream from the original charged particle stream. The physically separated charged particle stream is then removed from the system by use of an applied field and deflector.

Abstract translation: 本发明包括与癌肿瘤的带电粒子束放射治疗结合使用的带电粒子束提取方法和装置。 该系统使用射频腔系统来诱导带电粒子流的betatron振荡。 带电粒子流的足够的幅度调制导致带电粒子流撞击诸如箔的材料。 箔片降低了带电粒子流的能量，这减少了同步加速器中的带电粒子流的曲率半径，以允许从原始带电粒子流物理分离还原能带电粒子流。 然后通过使用施加的场和偏转器将物理分离的带电粒子流从系统中移除。

公开(公告)号：US07829866B2

公开(公告)日：2010-11-09

申请号：US12228473

申请日：2008-08-13

Applicant: Kenneth H. Purser ,  Norman L. Turner

Inventor： Kenneth H. Purser ,  Norman L. Turner

IPC: H01J3/20

CPC classification number: H01J37/05 ,  H01J37/1472 ,  H01J37/3171 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/152 ,  H01J2237/31701

Abstract: A method and apparatus satisfying growing demands for improving the intensity of implanting ions that impact a semiconductor wafer as it passes under an ion beam. The method and apparatus are directed to the design and combination together of novel magnetic ion-optical transport elements for implantation purposes for combating the disruptive effects of ion-beam induced space-charge forces. The design of the novel optical elements makes possible: (1) Focusing of a ribbon ion beam as the beam passes through uniform or non-uniform magnetic fields; (2) Reduction of the losses of ions comprising a d.c. ribbon beam to the magnetic poles when a ribbon beam is deflected by a magnetic field.

Abstract translation: 一种满足日益增长的要求的方法和装置，其用于提高在半导体晶片通过离子束时冲击半导体晶片的注入离子的强度。 该方法和装置涉及用于植入目的的新型磁离子 - 光学传输元件的设计和组合在一起，以抵抗离子束诱导的空间电荷力的破坏性影响。 新型光学元件的设计成为可能：（1）当光束通过均匀或不均匀的磁场时，对带状离子束进行聚焦; （2）减少包含直流电的离子的损失。 当带状光束被磁场偏转时，带状光束到达磁极。

公开(公告)号：US07755060B2

公开(公告)日：2010-07-13

申请号：US11784698

申请日：2007-04-09

Applicant: Eiji Kawai

Inventor： Eiji Kawai

IPC: G21K1/093 ,  H01J1/50 ,  H01J3/20

CPC classification number: H01J37/153 ,  H01J2237/1405 ,  H01J2237/1532 ,  H01J2237/26 ,  H01J2237/28

Abstract: There is disclosed a multipole lens that can be machined with improved accuracy. A method of fabricating this lens is also disclosed. The multipole lens has a blank material from which polar elements will be fabricated. The blank material is sandwiched vertically between two layers of film-like insulator. The blank material and the two layers of film-like insulator are sandwiched vertically between an upper ring and a lower ring. These members are provided with injection holes for injecting a curing agent. The injection holes of these members are aligned. The curing agent is injected into the holes and cured. Then, the blank material is machined by electric discharge machining to form the polar elements.

Abstract translation: 公开了可以提高准确度来加工的多极镜头。 还公开了一种制造该透镜的方法。 多极镜头具有制造极性元件的空白材料。 坯料垂直夹在两层薄膜状绝缘体之间。 空白材料和两层薄膜状绝缘体垂直夹在上环和下环之间。 这些构件设置有用于注入固化剂的注入孔。 这些构件的注入孔对齐。 将固化剂注入孔中并固化。 然后，通过放电加工对坯料进行加工以形成极性元件。