Invention Grant
US07755066B2 Techniques for improved uniformity tuning in an ion implanter system
有权
在离子注入机系统中改进均匀性调整的技术
- Patent Title: Techniques for improved uniformity tuning in an ion implanter system
- Patent Title (中): 在离子注入机系统中改进均匀性调整的技术
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Application No.: US12058594Application Date: 2008-03-28
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Publication No.: US07755066B2Publication Date: 2010-07-13
- Inventor: Morgan D. Evans
- Applicant: Morgan D. Evans
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: G21K5/10
- IPC: G21K5/10 ; H01J37/08

Abstract:
Techniques for uniformity tuning in an ion implanter system are disclosed. In one particular exemplary embodiment, the techniques may be realized as a method for ion beam uniformity tuning. The method may comprise generating an ion beam in an ion implanter system. The method may also comprise measuring a first ion beam current density profile along an ion beam path. The method may further comprise measuring a second ion beam current density profile along the ion beam path. In addition, the method may comprise determining a third ion beam current density profile along the ion beam path based at least in part on the first ion beam current density profile and the second ion beam current density profile.
Public/Granted literature
- US20090242808A1 TECHNIQUES FOR IMPROVED UNIFORMITY TUNING IN AN ION IMPLANTER SYSTEM Public/Granted day:2009-10-01
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