Invention Grant
- Patent Title: Infrared sensor manufacturing method suitable for mass production
- Patent Title (中): 红外传感器制造方法适合批量生产
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Application No.: US11710962Application Date: 2007-02-27
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Publication No.: US07781030B2Publication Date: 2010-08-24
- Inventor: Tetsuo Tsuchiya , Susumu Mizuta , Toshiya Kumagai , Toshihito Sasaki , Seiji Kurashina
- Applicant: Tetsuo Tsuchiya , Susumu Mizuta , Yuriko Mizuta, legal representative , Toshiya Kumagai , Toshihito Sasaki , Seiji Kurashina
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: National Institute of Advanced Industrial Science and Technology,NEC Corporation
- Current Assignee: National Institute of Advanced Industrial Science and Technology,NEC Corporation
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Young & Thompson
- Priority: JP2006-049492 20060227
- Main IPC: B05D3/06
- IPC: B05D3/06 ; G01J5/00

Abstract:
An infrared sensor manufacturing method according to this invention includes a step of forming a bridge structure of an insulating material on an Si substrate, a step of forming a vanadium oxide thin film on the bridge structure by a dry film forming method, a step of irradiating laser light onto the vanadium oxide thin film to thereby change material properties thereof, a step of forming the vanadium oxide thin film with the changed material properties into a bolometer resistor having a predetermined pattern, and a step of forming a protective layer of an insulating material so as to cover the bolometer resistor having the predetermined pattern and the bridge structure.
Public/Granted literature
- US20070272863A1 Infrared sensor manufacturing method suitable for mass production Public/Granted day:2007-11-29
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