Invention Grant
- Patent Title: Corrector
- Patent Title (中): 校正者
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Application No.: US12213493Application Date: 2008-06-20
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Publication No.: US07781742B2Publication Date: 2010-08-24
- Inventor: Joachim Zach
- Applicant: Joachim Zach
- Applicant Address: DE Heidelberg
- Assignee: CEOS Corrected Electron Optical Systems GmbH
- Current Assignee: CEOS Corrected Electron Optical Systems GmbH
- Current Assignee Address: DE Heidelberg
- Agent Paul Vincent
- Priority: DE102007049816 20071020
- Main IPC: H01J37/153
- IPC: H01J37/153 ; H01J37/26 ; H01J37/28

Abstract:
The invention concerns a corrector (10) for chromatic and aperture aberration correction in a scanning electron microscope or a scanning transmission electron microscope, comprising four multipole elements (1, 2, 3, 4) which are consecutively disposed in the optical path (9), the first (1) and fourth (4) of which are used to generate quadrupole fields (5, 6) and the second (2) and third (3) of which are used to generate octupole fields (11, 12) and quadrupole fields (7, 7′, 8, 8′), wherein the latter are superposed magnetic (7, 8) and electric (7′, 8′) fields, and wherein the quadrupole fields (5, 6, 7, 8) of all four multipole elements (1, 2, 3, 4) are successively rotated with respect to one another through 90°. Elimination of errors up to fifth order can be realized with a corrector (10) of this type in that the second (2) and the third (3) multipole elements are designed as twelve-pole elements, and an additional twelve-pole element (13) is inserted between the second (2) and the third (3) multipole element, and is loaded with current and/or voltage, such that an octupole field (14) is generated that is superposed by a twelve-pole field (15).
Public/Granted literature
- US20090101818A1 Corrector Public/Granted day:2009-04-23
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