A target surface of a target object including portions having different curvatures is inspected by using an illuminating device and a camera that are fixed, a supporting device for supporting the target object such that its position and orientation are variable. The position and orientation of the target object are controlled as its image is obtained for a plurality of times. The position and orientation of the target object are controlled such that the image of any point on the target surface will be included in at least one of the images obtained by the camera.