公开(公告)号：US20100232650A1

公开(公告)日：2010-09-16

申请号：US12712530

申请日：2010-02-25

Applicant: Yoshihiro KANETANI ,  Takahiro SUGA ,  Hiroaki TAKIMASA ,  Naoya NAKASHITA ,  Yusuke IIDA

Inventor： Yoshihiro KANETANI ,  Takahiro SUGA ,  Hiroaki TAKIMASA ,  Naoya NAKASHITA ,  Yusuke IIDA

IPC: G06K9/62

CPC classification number: G01B11/0608 ,  G01B11/14 ,  G02B7/38

Abstract: In a measurement apparatus, higher-quality measurement is realized in measurement of measurement object displacement or imaging of a two-dimensional image. In a controller, a light receiving signal of a photodiode is supplied to a displacement measuring unit of a sensor head in order to measure a height of a measurement object, and the height of a surface of the measurement object is measured based on the light receiving signal. Then, in the controller, image obtaining timing is determined based on the height of the measurement object. Specifically, a focus adjustment value corresponding to the computed height of the measurement object is obtained from the table, and an image obtaining signal is transmitted to an imaging device at the timing the focus adjustment value is realized. Therefore, a length between two points on the measurement object is computed from the thus obtained image based on the height of the measurement object.

Abstract translation: 在测量装置中，在测量对象位移或二维图像的成像的测量中实现更高质量的测量。 在控制器中，将光电二极管的光接收信号提供给传感器头的位移测量单元，以便测量测量对象的高度，并且基于光接收来测量测量对象的表面的高度 信号。 然后，在控制器中，基于测量对象的高度来确定图像获取定时。 具体地，从表中获得与测量对象的计算高度对应的焦点调整值，并且在实现焦点调整值的定时将图像获取信号发送到成像装置。 因此，基于测量对象的高度，从由此获得的图像计算测量对象上两点之间的长度。

公开(公告)号：US08917900B2

公开(公告)日：2014-12-23

申请号：US12712530

申请日：2010-02-25

Applicant: Yoshihiro Kanetani ,  Takahiro Suga ,  Hiroaki Takimasa ,  Naoya Nakashita ,  Yusuke Iida

Inventor： Yoshihiro Kanetani ,  Takahiro Suga ,  Hiroaki Takimasa ,  Naoya Nakashita ,  Yusuke Iida

IPC: G06K9/00 ,  G01B11/06 ,  G01B11/14 ,  G02B7/38

CPC classification number: G01B11/0608 ,  G01B11/14 ,  G02B7/38

Abstract: In a measurement apparatus, higher-quality measurement is realized in measurement of measurement object displacement or imaging of a two-dimensional image. In a controller, a light receiving signal of a photodiode is supplied to a displacement measuring unit of a sensor head in order to measure a height of a measurement object, and the height of a surface of the measurement object is measured based on the light receiving signal. Then, in the controller, image obtaining timing is determined based on the height of the measurement object. Specifically, a focus adjustment value corresponding to the computed height of the measurement object is obtained from the table, and an image obtaining signal is transmitted to an imaging device at the timing the focus adjustment value is realized. Therefore, a length between two points on the measurement object is computed from the thus obtained image based on the height of the measurement object.

Abstract translation: 在测量装置中，在测量对象位移或二维图像的成像的测量中实现更高质量的测量。 在控制器中，将光电二极管的光接收信号提供给传感器头的位移测量单元，以便测量测量对象的高度，并且基于光接收来测量测量对象的表面的高度 信号。 然后，在控制器中，基于测量对象的高度来确定图像获取定时。 具体地，从表中获得与测量对象的计算高度对应的焦点调整值，并且在实现焦点调整值的定时将图像获取信号发送到成像装置。 因此，基于测量对象的高度，从由此获得的图像计算测量对象上两点之间的长度。

公开(公告)号：US20070211240A1

公开(公告)日：2007-09-13

申请号：US11707293

申请日：2007-02-14

Applicant: Toshihiko Matsumoto ,  Hiroshi Okabe ,  Takashi Kinoshita ,  Yoshihiro Kanetani

Inventor： Toshihiko Matsumoto ,  Hiroshi Okabe ,  Takashi Kinoshita ,  Yoshihiro Kanetani

IPC: G01N21/88

CPC classification number: G01N21/9515 ,  G01N21/8851

Abstract: A target surface of a target object including portions having different curvatures is inspected by using an illuminating device and a camera that are fixed, a supporting device for supporting the target object such that its position and orientation are variable. The position and orientation of the target object are controlled as its image is obtained for a plurality of times. The position and orientation of the target object are controlled such that the image of any point on the target surface will be included in at least one of the images obtained by the camera.

Abstract translation: 通过使用固定的照明装置和照相机来检查包括具有不同曲率的部分的目标对象的目标表面，用于支撑目标对象的支撑装置，使得其位置和取向是可变的。 控制目标对象的位置和方向，因为其图像获得多次。 控制目标对象的位置和方向，使得目标表面上的任何点的图像将包含在由照相机获得的至少一幅图像中。

公开(公告)号：US07782451B2

公开(公告)日：2010-08-24

申请号：US11707293

申请日：2007-02-14

Applicant: Toshihiko Matsumoto ,  Hiroshi Okabe ,  Takashi Kinoshita ,  Yoshihiro Kanetani

Inventor： Toshihiko Matsumoto ,  Hiroshi Okabe ,  Takashi Kinoshita ,  Yoshihiro Kanetani

IPC: G01N21/00

CPC classification number: G01N21/9515 ,  G01N21/8851

Abstract: A target surface of a target object including portions having different curvatures is inspected by using an illuminating device and a camera that are fixed, a supporting device for supporting the target object such that its position and orientation are variable. The position and orientation of the target object are controlled as its image is obtained for a plurality of times. The position and orientation of the target object are controlled such that the image of any point on the target surface will be included in at least one of the images obtained by the camera.

Abstract translation: 通过使用固定的照明装置和照相机来检查包括具有不同曲率的部分的目标对象的目标表面，用于支撑目标对象的支撑装置，使得其位置和取向是可变的。 控制目标对象的位置和方向，因为其图像获得多次。 控制目标对象的位置和方向，使得目标表面上的任何点的图像将包含在由照相机获得的至少一幅图像中。

公开(公告)号：US20070211242A1

公开(公告)日：2007-09-13

申请号：US11714853

申请日：2007-03-07

Applicant: Hiroshi Okabe ,  Yoshihiro Kanetani ,  Toshihiko Matsumoto

Inventor： Hiroshi Okabe ,  Yoshihiro Kanetani ,  Toshihiko Matsumoto

IPC: G01N21/88

CPC classification number: G01N21/8806

Abstract: Light sources emit irradiation lights respectively, so that edge parts of mutual irradiation areas (inspection areas) are superposed one another. The imaging apparatus receives regular reflection lights and generates two images corresponding to each of the light sources. A main control part combines two images and determines presence/absence of a defect. By irradiating an inspected surface A with the irradiation lights from mutually different directions, a position of an area showing the defect in each image is slightly deviated. Therefore, even if a dimension of an area showing the defect is small in each image, by superposing two images one another, the dimension of the area showing a defect part becomes large in the image after composition. Thus, an accuracy of defect detection on the edge part of the inspection area can be improved.

Abstract translation: 光源分别发射照射灯，使得相互照射区域（检查区域）的边缘部分彼此重叠。 成像装置接收正常反射光并产生与每个光源相对应的两个图像。 主要控制部分组合了两个图像并确定缺陷的存在与否。 通过用来自相互不同方向的照射光照射检查面A，显示各图像中的缺陷的区域的位置稍微偏离。 因此，即使在每个图像中显示缺陷的区域的尺寸小，通过将两个图像彼此叠加，在组合之后的图像中，显示缺陷部分的区域的尺寸变大。 因此，可以提高检查区域的边缘部分的缺陷检测的精度。