Invention Grant
- Patent Title: Particle density measuring probe and particle density measuring equipment
- Patent Title (中): 颗粒密度测量探头和颗粒密度测量设备
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Application No.: US11987264Application Date: 2007-11-28
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Publication No.: US07782463B2Publication Date: 2010-08-24
- Inventor: Masanu Hori , Seigo Takashima , Hiroyuki Kano , Shoji Den
- Applicant: Masanu Hori , Seigo Takashima , Hiroyuki Kano , Shoji Den
- Applicant Address: JP Nishikamo-gun, Aichi JP Yokohama-shi, Kanagawa
- Assignee: Nu ECO Engineering Co., Ltd.,KATAGIRI Engineering Co., Ltd.
- Current Assignee: Nu ECO Engineering Co., Ltd.,KATAGIRI Engineering Co., Ltd.
- Current Assignee Address: JP Nishikamo-gun, Aichi JP Yokohama-shi, Kanagawa
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2007-078267 20070326
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01B9/02 ; G01J3/45 ; H05B31/26 ; H01J7/24

Abstract:
Disclosed is a particle density measuring probe for measuring the density of atoms or molecules in a plasma atmosphere by absorption spectroscopy. The probe has a cylindrical light guiding member provided in the plasma atmosphere. At the front end of the light guiding member, there is provided a reflection plate for reflecting light that has propagated through the cylindrical light guiding member. Behind the reflection plate, in a cross section perpendicular to the longitudinal direction of the light guiding member, a part devoid of a portion of wall surface is provided by a predetermined length in the longitudinal direction. A plasma introducing portion allows mutual contact between light passing through this part devoid of a portion of wall surface and atoms or molecules in the plasma atmosphere. The probe has a main body that guides light in an axial direction by total reflection by a side wall, and that is located behind the plasma introducing portion.
Public/Granted literature
- US20090237667A1 Particle density measuring probe and particle density measuring equipment Public/Granted day:2009-09-24
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