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US07790234B2 Low dielectric constant materials prepared from soluble fullerene clusters 有权
由可溶性富勒烯簇制备的低介电常数材料

Low dielectric constant materials prepared from soluble fullerene clusters
Abstract:
This disclosure relates generally to polymeric networks of fullerene compounds, to methods of preparing precursors for such networks, and to their subsequent use as low dielectric constant materials in microelectronic devices.
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