Invention Grant
- Patent Title: Micro structure for sensing trace chemicals
- Patent Title (中): 用于感测微量化学物质的微结构
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Application No.: US11678053Application Date: 2007-02-22
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Publication No.: US07790469B2Publication Date: 2010-09-07
- Inventor: Hong Wang , Zhimin Lin
- Applicant: Hong Wang , Zhimin Lin
- Applicant Address: US CA Mountain View
- Assignee: OptoTrace Technologies, Inc.
- Current Assignee: OptoTrace Technologies, Inc.
- Current Assignee Address: US CA Mountain View
- Agent Xin Wen
- Main IPC: G01N21/03
- IPC: G01N21/03 ; G01N33/553 ; H01L21/302 ; G01J3/44

Abstract:
A method to fabricate an optical scattering probe and the method includes the steps of a) depositing an conductive layer on a substrate followed by depositing a noble metal layer on top of the conductive layer and then an aluminum layer on top the noble metal layer; b) anodizing the aluminum layer to form a porous aluminum oxide layer having a plurality of pores; and c) etching the plurality of pores through the aluminum oxide layer and the noble metal layer for forming a nano-hole array. In a preferred embodiment, the step of etching the plurality of pores through the aluminum oxide layer and the noble metal layer further comprising a step of widening the pores followed by removing the aluminum oxide layer for forming a plurality of noble metal column on top of the conductive layer.
Public/Granted literature
- US20070140900A1 MICRO STRUCTURE FOR SENSING TRACE CHEMICALS Public/Granted day:2007-06-21
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