Invention Grant
- Patent Title: System and method for controlling intensity of a beam of electromagnetic radiation in ellipsometers and polarimeters
- Patent Title (中): 用于控制椭偏仪和偏光计中电磁辐射束强度的系统和方法
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Application No.: US12075956Application Date: 2008-03-14
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Publication No.: US07830512B2Publication Date: 2010-11-09
- Inventor: Galen L. Pfeiffer , Martin M. Liphardt
- Applicant: Galen L. Pfeiffer , Martin M. Liphardt
- Applicant Address: US NE Lincoln
- Assignee: J.A. Woollam Co., Inc.
- Current Assignee: J.A. Woollam Co., Inc.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: G01J4/00
- IPC: G01J4/00
Abstract:
An ellipsometer or polarimeter system and method for controlling intensity of an electromagnetic beam over a spectrum of wavelengths by applying control (P2) and beam (P) polarizers, optionally in combination with an intervening and control compensator (C).
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