Invention Grant
- Patent Title: System and method of controlling broad beam uniformity
- Patent Title (中): 控制宽光束均匀性的系统和方法
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Application No.: US12145713Application Date: 2008-06-25
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Publication No.: US07858955B2Publication Date: 2010-12-28
- Inventor: Shu Satoh , Edward C. Eisner , Manny Sieradzki
- Applicant: Shu Satoh , Edward C. Eisner , Manny Sieradzki
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01J27/02
- IPC: H01J27/02 ; H01J27/00

Abstract:
An ion beam uniformity control system, wherein the uniformity control system comprising a differential pumping chamber that encloses an array of individually controlled gas jets, wherein the gas pressure of the individually controlled gas jets are powered by a controller to change the fraction of charge exchanged ions, and wherein the charge exchange reactions between the gas and ions change the fraction of the ions with original charge state of a broad ion beam, wherein the charge exchanged portion of the broad ion beam is removed utilizing an deflector that generates a magnetic field, a Faraday cup profiler for measuring the broad ion beam profile; and adjusting the individually controlled gas jets based upon feedback provided to the controller to obtain the desired broad ion beam.
Public/Granted literature
- US20090321657A1 SYSTEM AND METHOD OF CONTROLLING BROAD BEAM UNIFORMITY Public/Granted day:2009-12-31
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