Invention Grant
- Patent Title: Photo diode and related method for fabrication
- Patent Title (中): 光电二极管及相关制造方法
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Application No.: US12393048Application Date: 2009-02-26
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Publication No.: US07863082B2Publication Date: 2011-01-04
- Inventor: Jhy-Jyi Sze , Ming-Yi Wang , Junbo Chen
- Applicant: Jhy-Jyi Sze , Ming-Yi Wang , Junbo Chen
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/336 ; H01L21/8234 ; H01L21/8238

Abstract:
A method for fabricating a photo diode first involves providing a substrate. A doping area is then formed on the substrate. Afterwards, a dielectric layer, and a first poly-silicon layer are formed on the substrate. An opening is then formed to expose a surface of the doping area. A second poly-silicon layer is formed on the first poly-silicon layer and within the opening. The second poly-silicon layer is patterned to form a wire, while the first poly-silicon layer is patterned to form a gate. Finally, a source/drain is formed.
Public/Granted literature
- US20090162971A1 PHOTO DIODE AND RELATED METHOD FOR FABRICATION Public/Granted day:2009-06-25
Information query
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