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US07869036B2 Analysis apparatus for analyzing a specimen by obtaining electromagnetic spectrum information 有权
用于通过获得电磁频谱信息来分析样本的分析装置

Analysis apparatus for analyzing a specimen by obtaining electromagnetic spectrum information
Abstract:
An analysis apparatus for analyzing a specimen comprises a spectral separator for dispersing spatially an electromagnetic wave introduced from the specimen into spectral components, a sensing element array containing plural sensing elements for sensing the spectral components of the electromagnetic wave dispersed spatially by the spectral separator, and a spectrum calculator for calculating the spectrum from the signal sensed by the sensing elements; the sensing element array having sensitivities different to each of the spectral components of the electromagnetic wave dispersed spatially by the spectral separator, and the spectral separator and the sensing element array being placed so as to receive the spectral components by each of the sensing elements at different incident angles.
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