Invention Grant
- Patent Title: Analysis apparatus for analyzing a specimen by obtaining electromagnetic spectrum information
- Patent Title (中): 用于通过获得电磁频谱信息来分析样本的分析装置
-
Application No.: US12196224Application Date: 2008-08-21
-
Publication No.: US07869036B2Publication Date: 2011-01-11
- Inventor: Kousuke Kajiki , Toshihiko Ouchi , Ryota Sekiguchi
- Applicant: Kousuke Kajiki , Toshihiko Ouchi , Ryota Sekiguchi
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2007-224941 20070831; JP2008-168013 20080627
- Main IPC: G01J3/18
- IPC: G01J3/18 ; G01J3/20 ; G01J3/28

Abstract:
An analysis apparatus for analyzing a specimen comprises a spectral separator for dispersing spatially an electromagnetic wave introduced from the specimen into spectral components, a sensing element array containing plural sensing elements for sensing the spectral components of the electromagnetic wave dispersed spatially by the spectral separator, and a spectrum calculator for calculating the spectrum from the signal sensed by the sensing elements; the sensing element array having sensitivities different to each of the spectral components of the electromagnetic wave dispersed spatially by the spectral separator, and the spectral separator and the sensing element array being placed so as to receive the spectral components by each of the sensing elements at different incident angles.
Public/Granted literature
- US20090059226A1 ELECTROMAGNETIC ANALYSIS APPARATUS Public/Granted day:2009-03-05
Information query