Invention Grant
- Patent Title: Microscopic-measurement apparatus
- Patent Title (中): 显微镜测量装置
-
Application No.: US12255687Application Date: 2008-10-22
-
Publication No.: US07869039B2Publication Date: 2011-01-11
- Inventor: Kenichi Akao , Jun Koshoubu
- Applicant: Kenichi Akao , Jun Koshoubu
- Applicant Address: JP Hachioji-shi, Tokyo
- Assignee: JASCO Corporation
- Current Assignee: JASCO Corporation
- Current Assignee Address: JP Hachioji-shi, Tokyo
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2007-273967 20071022
- Main IPC: G01J4/00
- IPC: G01J4/00

Abstract:
A microscopic-measurement apparatus capable of conducting measurement successively in several set areas regardless of the type of stage driving system or the precision of the stage driving system. The microscopic-measurement apparatus for acquiring optical information from desired portions of a sample by moving a measuring optical axis on a surface of the sample includes an observation-image display section for displaying a sample surface image as an observation image, in a range of visual field which is observable at a present sample position; an optical-axis display section for displaying areas to be measured and a present position of the measuring optical axis in an overlapped state with the observation image; an area setting section capable of setting measuring areas by expanding, reducing, changing in shape and moving the areas to be measured; and an optical-information acquisition section for measuring one set measuring area or several set measuring areas successively with an instruction of starting measurement.
Public/Granted literature
- US20090103173A1 Microscopic-Measurement Apparatus Public/Granted day:2009-04-23
Information query