Invention Grant
US07869894B2 Method and system for advanced process control using a combination of weighted relative bias values 有权
使用加权相对偏差值的组合进行高级过程控制的方法和系统

Method and system for advanced process control using a combination of weighted relative bias values
Abstract:
By directly using relative biases, contained in the relative bias date matrix, and by appropriately weighting the components thereof, sampling rate limitations in an APC control scheme may be efficiently compensated for. In particular embodiments, an age-based weighting factor is established that scales measurement data uncertainty according to the delay with which the corresponding measurement data for a specific control thread are obtained.
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