Invention Grant
US07869894B2 Method and system for advanced process control using a combination of weighted relative bias values
有权
使用加权相对偏差值的组合进行高级过程控制的方法和系统
- Patent Title: Method and system for advanced process control using a combination of weighted relative bias values
- Patent Title (中): 使用加权相对偏差值的组合进行高级过程控制的方法和系统
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Application No.: US11420625Application Date: 2006-05-26
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Publication No.: US07869894B2Publication Date: 2011-01-11
- Inventor: James Broc Stirton , Andre Holfeld
- Applicant: James Broc Stirton , Andre Holfeld
- Applicant Address: US TX Austin
- Assignee: Advanced Micro Devices, Inc.
- Current Assignee: Advanced Micro Devices, Inc.
- Current Assignee Address: US TX Austin
- Agency: Williams, Morgan & Amerson, P.C.
- Priority: DE102005046972 20050930
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
By directly using relative biases, contained in the relative bias date matrix, and by appropriately weighting the components thereof, sampling rate limitations in an APC control scheme may be efficiently compensated for. In particular embodiments, an age-based weighting factor is established that scales measurement data uncertainty according to the delay with which the corresponding measurement data for a specific control thread are obtained.
Public/Granted literature
- US20070078556A1 METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL USING A COMBINATION OF WEIGHTED RELATIVE BIAS VALUES Public/Granted day:2007-04-05
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